JPS63170458U - - Google Patents
Info
- Publication number
- JPS63170458U JPS63170458U JP6074287U JP6074287U JPS63170458U JP S63170458 U JPS63170458 U JP S63170458U JP 6074287 U JP6074287 U JP 6074287U JP 6074287 U JP6074287 U JP 6074287U JP S63170458 U JPS63170458 U JP S63170458U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processed
- utility
- attached
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060742U JPH057238Y2 (enrdf_load_stackoverflow) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060742U JPH057238Y2 (enrdf_load_stackoverflow) | 1987-04-23 | 1987-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170458U true JPS63170458U (enrdf_load_stackoverflow) | 1988-11-07 |
| JPH057238Y2 JPH057238Y2 (enrdf_load_stackoverflow) | 1993-02-24 |
Family
ID=30893430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987060742U Expired - Lifetime JPH057238Y2 (enrdf_load_stackoverflow) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057238Y2 (enrdf_load_stackoverflow) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5270149U (enrdf_load_stackoverflow) * | 1975-11-21 | 1977-05-25 | ||
| JPS5969964U (ja) * | 1982-10-28 | 1984-05-12 | 日本電子株式会社 | 成膜装置 |
| JPS5995157U (ja) * | 1982-12-20 | 1984-06-28 | 株式会社日立製作所 | イオンプレ−テイング装置 |
| JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
| JPS6210266A (ja) * | 1985-07-06 | 1987-01-19 | Kobe Steel Ltd | 蒸着装置 |
-
1987
- 1987-04-23 JP JP1987060742U patent/JPH057238Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5270149U (enrdf_load_stackoverflow) * | 1975-11-21 | 1977-05-25 | ||
| JPS5969964U (ja) * | 1982-10-28 | 1984-05-12 | 日本電子株式会社 | 成膜装置 |
| JPS5995157U (ja) * | 1982-12-20 | 1984-06-28 | 株式会社日立製作所 | イオンプレ−テイング装置 |
| JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
| JPS6210266A (ja) * | 1985-07-06 | 1987-01-19 | Kobe Steel Ltd | 蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057238Y2 (enrdf_load_stackoverflow) | 1993-02-24 |