JPS6339392B2 - - Google Patents
Info
- Publication number
- JPS6339392B2 JPS6339392B2 JP58200911A JP20091183A JPS6339392B2 JP S6339392 B2 JPS6339392 B2 JP S6339392B2 JP 58200911 A JP58200911 A JP 58200911A JP 20091183 A JP20091183 A JP 20091183A JP S6339392 B2 JPS6339392 B2 JP S6339392B2
- Authority
- JP
- Japan
- Prior art keywords
- pulleys
- support member
- wafer support
- wound around
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 35
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000032258 transport Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Manipulator (AREA)
- Reciprocating Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20091183A JPS6094286A (ja) | 1983-10-28 | 1983-10-28 | ウエハ搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20091183A JPS6094286A (ja) | 1983-10-28 | 1983-10-28 | ウエハ搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6094286A JPS6094286A (ja) | 1985-05-27 |
JPS6339392B2 true JPS6339392B2 (US08197722-20120612-C00042.png) | 1988-08-04 |
Family
ID=16432315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20091183A Granted JPS6094286A (ja) | 1983-10-28 | 1983-10-28 | ウエハ搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6094286A (US08197722-20120612-C00042.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62222906A (ja) * | 1986-03-25 | 1987-09-30 | Hitachi Electronics Eng Co Ltd | ウエ−ハ搬送機構 |
JP2772920B2 (ja) * | 1994-08-29 | 1998-07-09 | 日本サーボ株式会社 | 伸縮回転駆動装置 |
JP5102647B2 (ja) * | 2008-02-21 | 2012-12-19 | 敬 齋藤 | マニピュレータ機構 |
JP7461013B2 (ja) * | 2019-12-24 | 2024-04-03 | バキュームプロダクツ株式会社 | 搬送機構 |
JP2021186887A (ja) * | 2020-05-25 | 2021-12-13 | 公立大学法人秋田県立大学 | 伸縮装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4858560A (US08197722-20120612-C00042.png) * | 1971-11-22 | 1973-08-16 |
-
1983
- 1983-10-28 JP JP20091183A patent/JPS6094286A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4858560A (US08197722-20120612-C00042.png) * | 1971-11-22 | 1973-08-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS6094286A (ja) | 1985-05-27 |
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