JPS63392B2 - - Google Patents
Info
- Publication number
- JPS63392B2 JPS63392B2 JP58155910A JP15591083A JPS63392B2 JP S63392 B2 JPS63392 B2 JP S63392B2 JP 58155910 A JP58155910 A JP 58155910A JP 15591083 A JP15591083 A JP 15591083A JP S63392 B2 JPS63392 B2 JP S63392B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- less
- weight
- sintered body
- boron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 49
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 41
- 239000002245 particle Substances 0.000 claims description 29
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910052796 boron Inorganic materials 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 239000012298 atmosphere Substances 0.000 claims description 9
- 238000000197 pyrolysis Methods 0.000 claims description 3
- 150000001639 boron compounds Chemical class 0.000 claims description 2
- 150000001722 carbon compounds Chemical class 0.000 claims 1
- 238000010304 firing Methods 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000005245 sintering Methods 0.000 description 19
- 239000007789 gas Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000011882 ultra-fine particle Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 238000005979 thermal decomposition reaction Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000000635 electron micrograph Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VIPCDVWYAADTGR-UHFFFAOYSA-N trimethyl(methylsilyl)silane Chemical compound C[SiH2][Si](C)(C)C VIPCDVWYAADTGR-UHFFFAOYSA-N 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000001638 boron Chemical class 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical group C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011505 plaster Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Ceramic Products (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58155910A JPS6046974A (ja) | 1983-08-26 | 1983-08-26 | 炭化けい素焼結体 |
| EP83112256A EP0143122A3 (de) | 1983-08-26 | 1983-12-06 | Ultrafeines Siliziumkarbid-Pulver, Verfahren zu seiner Herstellung und daraus hergestellter gesinterter Formkörper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58155910A JPS6046974A (ja) | 1983-08-26 | 1983-08-26 | 炭化けい素焼結体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6046974A JPS6046974A (ja) | 1985-03-14 |
| JPS63392B2 true JPS63392B2 (de) | 1988-01-06 |
Family
ID=15616181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58155910A Granted JPS6046974A (ja) | 1983-08-26 | 1983-08-26 | 炭化けい素焼結体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6046974A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6046912A (ja) * | 1983-08-26 | 1985-03-14 | Shin Etsu Chem Co Ltd | 超微粒子状炭化けい素の製造方法 |
| JPS61251572A (ja) * | 1985-04-30 | 1986-11-08 | 株式会社日立製作所 | 炭化珪素焼結体およびその製法 |
| JPS62472U (de) * | 1985-06-19 | 1987-01-06 | ||
| JPS62260772A (ja) * | 1986-05-06 | 1987-11-13 | 科学技術庁無機材質研究所長 | 高純度炭化珪素焼結体の製造方法 |
| JPS638263A (ja) * | 1986-06-26 | 1988-01-14 | 新技術事業団 | ＳｉＣ超微粉焼結体の製造法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57170877A (en) * | 1975-06-30 | 1982-10-21 | Gen Electric | Substantially homogeneous submicron particle mixture for silicon carbide sintered body manufacture |
| JPS57183369A (en) * | 1981-05-08 | 1982-11-11 | Sumitomo Electric Industries | Manufacture of non-oxide ceramics |
-
1983
- 1983-08-26 JP JP58155910A patent/JPS6046974A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57170877A (en) * | 1975-06-30 | 1982-10-21 | Gen Electric | Substantially homogeneous submicron particle mixture for silicon carbide sintered body manufacture |
| JPS57183369A (en) * | 1981-05-08 | 1982-11-11 | Sumitomo Electric Industries | Manufacture of non-oxide ceramics |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6046974A (ja) | 1985-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4004934A (en) | Sintered dense silicon carbide | |
| US4571331A (en) | Ultrafine powder of silicon carbide, a method for the preparation thereof and a sintered body therefrom | |
| US4560668A (en) | Substantially pore-free shaped articles of polycrystalline silicon carbide, and a process for their manufacture by isostatic hot-pressing | |
| JPS6228109B2 (de) | ||
| GB2082165A (en) | Silicon carbide ceramic | |
| US4332755A (en) | Sintered silicon carbide - aluminum nitride articles and method of making such articles | |
| CA1092615A (en) | High density hot pressed thermal shock resistant silicon carbide | |
| JPS6128627B2 (de) | ||
| JPH0251863B2 (de) | ||
| US5064589A (en) | Method for producing high density hexagonal boron nitride sintered article | |
| EP0143122A2 (de) | Ultrafeines Siliziumkarbid-Pulver, Verfahren zu seiner Herstellung und daraus hergestellter gesinterter Formkörper | |
| JPH0379306B2 (de) | ||
| JPS63392B2 (de) | ||
| JPH0228539B2 (de) | ||
| JPS638069B2 (de) | ||
| EP0064264B1 (de) | Siliciumkarbidpulvermischung und Verfahren zur Herstellung von Sinterkörpern aus dieser Pulvermischung | |
| JPS632913B2 (de) | ||
| JPS6212663A (ja) | Ｂ４ｃ質複合体およびその製造方法 | |
| JPS6253473B2 (de) | ||
| JP4542747B2 (ja) | 高強度六方晶窒化硼素焼結体の製法 | |
| JP2531871B2 (ja) | 高密度窒化ほう素常圧焼結体の製造方法 | |
| JPH0224786B2 (de) | ||
| JPH0224785B2 (de) | ||
| JPS6126514B2 (de) | ||
| JPH05254945A (ja) | 反応焼結セラミックスの製造法 |