JPS6339258Y2 - - Google Patents
Info
- Publication number
- JPS6339258Y2 JPS6339258Y2 JP17116084U JP17116084U JPS6339258Y2 JP S6339258 Y2 JPS6339258 Y2 JP S6339258Y2 JP 17116084 U JP17116084 U JP 17116084U JP 17116084 U JP17116084 U JP 17116084U JP S6339258 Y2 JPS6339258 Y2 JP S6339258Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- heater
- stirrer
- teflon
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 47
- 239000007788 liquid Substances 0.000 claims description 12
- 238000003756 stirring Methods 0.000 claims description 3
- 239000004809 Teflon Substances 0.000 description 11
- 229920006362 Teflon® Polymers 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17116084U JPS6339258Y2 (en, 2012) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17116084U JPS6339258Y2 (en, 2012) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186463U JPS6186463U (en, 2012) | 1986-06-06 |
| JPS6339258Y2 true JPS6339258Y2 (en, 2012) | 1988-10-14 |
Family
ID=30728855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17116084U Expired JPS6339258Y2 (en, 2012) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339258Y2 (en, 2012) |
-
1984
- 1984-11-12 JP JP17116084U patent/JPS6339258Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6186463U (en, 2012) | 1986-06-06 |
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