JPS6337510B2 - - Google Patents

Info

Publication number
JPS6337510B2
JPS6337510B2 JP5464579A JP5464579A JPS6337510B2 JP S6337510 B2 JPS6337510 B2 JP S6337510B2 JP 5464579 A JP5464579 A JP 5464579A JP 5464579 A JP5464579 A JP 5464579A JP S6337510 B2 JPS6337510 B2 JP S6337510B2
Authority
JP
Japan
Prior art keywords
groove
anisotropic etching
etching
semiconductor substrate
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5464579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55146935A (en
Inventor
Hisashi Haneda
Tetsuo Ichikawa
Juki Shimada
Hideyoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5464579A priority Critical patent/JPS55146935A/ja
Publication of JPS55146935A publication Critical patent/JPS55146935A/ja
Publication of JPS6337510B2 publication Critical patent/JPS6337510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
JP5464579A 1979-05-02 1979-05-02 Manufacturing of semiconductor device Granted JPS55146935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5464579A JPS55146935A (en) 1979-05-02 1979-05-02 Manufacturing of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5464579A JPS55146935A (en) 1979-05-02 1979-05-02 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55146935A JPS55146935A (en) 1980-11-15
JPS6337510B2 true JPS6337510B2 (enrdf_load_stackoverflow) 1988-07-26

Family

ID=12976504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5464579A Granted JPS55146935A (en) 1979-05-02 1979-05-02 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55146935A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS55146935A (en) 1980-11-15

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