JPS6336923Y2 - - Google Patents
Info
- Publication number
- JPS6336923Y2 JPS6336923Y2 JP16563481U JP16563481U JPS6336923Y2 JP S6336923 Y2 JPS6336923 Y2 JP S6336923Y2 JP 16563481 U JP16563481 U JP 16563481U JP 16563481 U JP16563481 U JP 16563481U JP S6336923 Y2 JPS6336923 Y2 JP S6336923Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- cylindrical surface
- rectangular parallelepiped
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 239000012212 insulator Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000000694 effects Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16563481U JPS5870666U (ja) | 1981-11-06 | 1981-11-06 | ８極静電偏向器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16563481U JPS5870666U (ja) | 1981-11-06 | 1981-11-06 | ８極静電偏向器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5870666U JPS5870666U (ja) | 1983-05-13 |
| JPS6336923Y2 true JPS6336923Y2 (enrdf_load_html_response) | 1988-09-29 |
Family
ID=29957824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16563481U Granted JPS5870666U (ja) | 1981-11-06 | 1981-11-06 | ８極静電偏向器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5870666U (enrdf_load_html_response) |
-
1981
- 1981-11-06 JP JP16563481U patent/JPS5870666U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5870666U (ja) | 1983-05-13 |
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