JPS6336059U - - Google Patents
Info
- Publication number
- JPS6336059U JPS6336059U JP12967686U JP12967686U JPS6336059U JP S6336059 U JPS6336059 U JP S6336059U JP 12967686 U JP12967686 U JP 12967686U JP 12967686 U JP12967686 U JP 12967686U JP S6336059 U JPS6336059 U JP S6336059U
- Authority
- JP
- Japan
- Prior art keywords
- type semiconductor
- pressure transducer
- semiconductor pressure
- diffusion type
- chip resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第1図は本考案に係る拡散型半導体圧力トラン
スジユーサの底面図。第2図は第1図の中央横断
面図。第3図、第4図はそれぞれ本考案に係るチ
ツプ抵抗を組込んだ回路図。 1……ハウジング、2a,2b……端子、3…
…センサチツプ、4……チツプ抵抗。
スジユーサの底面図。第2図は第1図の中央横断
面図。第3図、第4図はそれぞれ本考案に係るチ
ツプ抵抗を組込んだ回路図。 1……ハウジング、2a,2b……端子、3…
…センサチツプ、4……チツプ抵抗。
Claims (1)
- 【実用新案登録請求の範囲】 1 内部に感度の温度補償用抵抗としてチツプ抵
抗を収容してなる拡散型半導体圧力トランスジユ
ーサ。 2 チツプ抵抗をセンサ内部に組込んだ実用新案
登録請求の範囲第1項記載の拡散型半導体圧力ト
ランスジユーサ。 3 ブリツジ回路の入力側若しくは出力側にチツ
プ抵抗を配設した実用新案登録請求の範囲第2項
記載の拡散型半導体圧力トランスジユーサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12967686U JPS6336059U (ja) | 1986-08-26 | 1986-08-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12967686U JPS6336059U (ja) | 1986-08-26 | 1986-08-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6336059U true JPS6336059U (ja) | 1988-03-08 |
Family
ID=31026459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12967686U Pending JPS6336059U (ja) | 1986-08-26 | 1986-08-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6336059U (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02201135A (ja) * | 1989-01-30 | 1990-08-09 | Kayaba Ind Co Ltd | 圧力センサ |
JP2011220686A (ja) * | 2010-04-02 | 2011-11-04 | Dainippon Printing Co Ltd | 半導体加速度センサ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55146019A (en) * | 1979-05-01 | 1980-11-14 | Toshiba Corp | Pressure detector of semiconductor |
-
1986
- 1986-08-26 JP JP12967686U patent/JPS6336059U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55146019A (en) * | 1979-05-01 | 1980-11-14 | Toshiba Corp | Pressure detector of semiconductor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02201135A (ja) * | 1989-01-30 | 1990-08-09 | Kayaba Ind Co Ltd | 圧力センサ |
JP2011220686A (ja) * | 2010-04-02 | 2011-11-04 | Dainippon Printing Co Ltd | 半導体加速度センサ |