JPS6336044U - - Google Patents
Info
- Publication number
- JPS6336044U JPS6336044U JP12867086U JP12867086U JPS6336044U JP S6336044 U JPS6336044 U JP S6336044U JP 12867086 U JP12867086 U JP 12867086U JP 12867086 U JP12867086 U JP 12867086U JP S6336044 U JPS6336044 U JP S6336044U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- distance
- microscope
- mirror
- needle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011179 visual inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12867086U JPS6336044U (forum.php) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12867086U JPS6336044U (forum.php) | 1986-08-22 | 1986-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6336044U true JPS6336044U (forum.php) | 1988-03-08 |
Family
ID=31024546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12867086U Pending JPS6336044U (forum.php) | 1986-08-22 | 1986-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336044U (forum.php) |
-
1986
- 1986-08-22 JP JP12867086U patent/JPS6336044U/ja active Pending
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