JPS6335711B2 - - Google Patents
Info
- Publication number
- JPS6335711B2 JPS6335711B2 JP53128345A JP12834578A JPS6335711B2 JP S6335711 B2 JPS6335711 B2 JP S6335711B2 JP 53128345 A JP53128345 A JP 53128345A JP 12834578 A JP12834578 A JP 12834578A JP S6335711 B2 JPS6335711 B2 JP S6335711B2
- Authority
- JP
- Japan
- Prior art keywords
- flat plate
- heat
- wafer
- plate member
- heat source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004381 surface treatment Methods 0.000 claims description 6
- 239000003779 heat-resistant material Substances 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12834578A JPS5555536A (en) | 1978-10-20 | 1978-10-20 | Device for treating surface under vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12834578A JPS5555536A (en) | 1978-10-20 | 1978-10-20 | Device for treating surface under vacuum |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10458684A Division JPS6024019A (ja) | 1984-05-25 | 1984-05-25 | 表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5555536A JPS5555536A (en) | 1980-04-23 |
| JPS6335711B2 true JPS6335711B2 (bg) | 1988-07-15 |
Family
ID=14982503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12834578A Granted JPS5555536A (en) | 1978-10-20 | 1978-10-20 | Device for treating surface under vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5555536A (bg) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6029166U (ja) * | 1983-08-03 | 1985-02-27 | 日本真空技術株式会社 | 真空装置に於ける基板加熱装置 |
| JPS6024019A (ja) * | 1984-05-25 | 1985-02-06 | Hitachi Ltd | 表面処理装置 |
| US6087632A (en) * | 1999-01-11 | 2000-07-11 | Tokyo Electron Limited | Heat processing device with hot plate and associated reflector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS445160Y1 (bg) * | 1966-03-07 | 1969-02-25 |
-
1978
- 1978-10-20 JP JP12834578A patent/JPS5555536A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS445160Y1 (bg) * | 1966-03-07 | 1969-02-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5555536A (en) | 1980-04-23 |
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