JPS6334167U - - Google Patents

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Publication number
JPS6334167U
JPS6334167U JP12829386U JP12829386U JPS6334167U JP S6334167 U JPS6334167 U JP S6334167U JP 12829386 U JP12829386 U JP 12829386U JP 12829386 U JP12829386 U JP 12829386U JP S6334167 U JPS6334167 U JP S6334167U
Authority
JP
Japan
Prior art keywords
gas
retort
treatment furnace
supply pipe
surface treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12829386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12829386U priority Critical patent/JPS6334167U/ja
Publication of JPS6334167U publication Critical patent/JPS6334167U/ja
Pending legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
JP12829386U 1986-08-25 1986-08-25 Pending JPS6334167U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12829386U JPS6334167U (enrdf_load_stackoverflow) 1986-08-25 1986-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12829386U JPS6334167U (enrdf_load_stackoverflow) 1986-08-25 1986-08-25

Publications (1)

Publication Number Publication Date
JPS6334167U true JPS6334167U (enrdf_load_stackoverflow) 1988-03-04

Family

ID=31023835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12829386U Pending JPS6334167U (enrdf_load_stackoverflow) 1986-08-25 1986-08-25

Country Status (1)

Country Link
JP (1) JPS6334167U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351187A (en) * 1976-10-20 1978-05-10 Matsushita Electric Ind Co Ltd Gas phase chemical evaporation apparatus
JPS59166238A (ja) * 1983-03-10 1984-09-19 Toshiba Corp 薄膜形成装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351187A (en) * 1976-10-20 1978-05-10 Matsushita Electric Ind Co Ltd Gas phase chemical evaporation apparatus
JPS59166238A (ja) * 1983-03-10 1984-09-19 Toshiba Corp 薄膜形成装置

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