JPS6334168U - - Google Patents

Info

Publication number
JPS6334168U
JPS6334168U JP12829486U JP12829486U JPS6334168U JP S6334168 U JPS6334168 U JP S6334168U JP 12829486 U JP12829486 U JP 12829486U JP 12829486 U JP12829486 U JP 12829486U JP S6334168 U JPS6334168 U JP S6334168U
Authority
JP
Japan
Prior art keywords
gas
retort
treatment furnace
surface treatment
gas inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12829486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12829486U priority Critical patent/JPS6334168U/ja
Publication of JPS6334168U publication Critical patent/JPS6334168U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12829486U 1986-08-25 1986-08-25 Pending JPS6334168U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12829486U JPS6334168U (enrdf_load_stackoverflow) 1986-08-25 1986-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12829486U JPS6334168U (enrdf_load_stackoverflow) 1986-08-25 1986-08-25

Publications (1)

Publication Number Publication Date
JPS6334168U true JPS6334168U (enrdf_load_stackoverflow) 1988-03-04

Family

ID=31023837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12829486U Pending JPS6334168U (enrdf_load_stackoverflow) 1986-08-25 1986-08-25

Country Status (1)

Country Link
JP (1) JPS6334168U (enrdf_load_stackoverflow)

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