JPS6333147Y2 - - Google Patents

Info

Publication number
JPS6333147Y2
JPS6333147Y2 JP1982153276U JP15327682U JPS6333147Y2 JP S6333147 Y2 JPS6333147 Y2 JP S6333147Y2 JP 1982153276 U JP1982153276 U JP 1982153276U JP 15327682 U JP15327682 U JP 15327682U JP S6333147 Y2 JPS6333147 Y2 JP S6333147Y2
Authority
JP
Japan
Prior art keywords
external force
semiconductor chip
transmitting body
force transmitting
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982153276U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5958339U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15327682U priority Critical patent/JPS5958339U/ja
Publication of JPS5958339U publication Critical patent/JPS5958339U/ja
Application granted granted Critical
Publication of JPS6333147Y2 publication Critical patent/JPS6333147Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Force In General (AREA)
  • Measuring Fluid Pressure (AREA)
JP15327682U 1982-10-12 1982-10-12 カンチレバ−形半導体圧力検出器 Granted JPS5958339U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15327682U JPS5958339U (ja) 1982-10-12 1982-10-12 カンチレバ−形半導体圧力検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15327682U JPS5958339U (ja) 1982-10-12 1982-10-12 カンチレバ−形半導体圧力検出器

Publications (2)

Publication Number Publication Date
JPS5958339U JPS5958339U (ja) 1984-04-16
JPS6333147Y2 true JPS6333147Y2 (cs) 1988-09-05

Family

ID=30339159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15327682U Granted JPS5958339U (ja) 1982-10-12 1982-10-12 カンチレバ−形半導体圧力検出器

Country Status (1)

Country Link
JP (1) JPS5958339U (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429118B2 (cs) * 1972-09-20 1979-09-20
CA1078217A (en) * 1976-03-31 1980-05-27 Robert C. Whitehead (Jr.) Force transducing cantilever beam and pressure transducer incorporating it

Also Published As

Publication number Publication date
JPS5958339U (ja) 1984-04-16

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