JPS6332869B2 - - Google Patents
Info
- Publication number
- JPS6332869B2 JPS6332869B2 JP3670881A JP3670881A JPS6332869B2 JP S6332869 B2 JPS6332869 B2 JP S6332869B2 JP 3670881 A JP3670881 A JP 3670881A JP 3670881 A JP3670881 A JP 3670881A JP S6332869 B2 JPS6332869 B2 JP S6332869B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- etching
- resist
- pattern
- bso
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 38
- 238000001312 dry etching Methods 0.000 claims description 16
- 238000000992 sputter etching Methods 0.000 claims description 7
- -1 bismuth oxide compound Chemical class 0.000 claims description 5
- 238000001020 plasma etching Methods 0.000 claims description 5
- 229910052797 bismuth Inorganic materials 0.000 claims description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 3
- 229910000416 bismuth oxide Inorganic materials 0.000 claims description 3
- 238000005530 etching Methods 0.000 description 19
- 239000000463 material Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 239000010410 layer Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- CJJMLLCUQDSZIZ-UHFFFAOYSA-N oxobismuth Chemical class [Bi]=O CJJMLLCUQDSZIZ-UHFFFAOYSA-N 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3670881A JPS57152468A (en) | 1981-03-13 | 1981-03-13 | Formation of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3670881A JPS57152468A (en) | 1981-03-13 | 1981-03-13 | Formation of thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57152468A JPS57152468A (en) | 1982-09-20 |
| JPS6332869B2 true JPS6332869B2 (enExample) | 1988-07-01 |
Family
ID=12477265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3670881A Granted JPS57152468A (en) | 1981-03-13 | 1981-03-13 | Formation of thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57152468A (enExample) |
-
1981
- 1981-03-13 JP JP3670881A patent/JPS57152468A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57152468A (en) | 1982-09-20 |
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