JPS6332592B2 - - Google Patents
Info
- Publication number
- JPS6332592B2 JPS6332592B2 JP57109720A JP10972082A JPS6332592B2 JP S6332592 B2 JPS6332592 B2 JP S6332592B2 JP 57109720 A JP57109720 A JP 57109720A JP 10972082 A JP10972082 A JP 10972082A JP S6332592 B2 JPS6332592 B2 JP S6332592B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- detecting
- extreme value
- takes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 60
- 238000001514 detection method Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57109720A JPS591149A (ja) | 1982-06-28 | 1982-06-28 | 最適研磨方向の自動判定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57109720A JPS591149A (ja) | 1982-06-28 | 1982-06-28 | 最適研磨方向の自動判定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS591149A JPS591149A (ja) | 1984-01-06 |
| JPS6332592B2 true JPS6332592B2 (enExample) | 1988-06-30 |
Family
ID=14517509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57109720A Granted JPS591149A (ja) | 1982-06-28 | 1982-06-28 | 最適研磨方向の自動判定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS591149A (enExample) |
-
1982
- 1982-06-28 JP JP57109720A patent/JPS591149A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS591149A (ja) | 1984-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1070403C (zh) | 半导体片研磨机的工件夹持器及其定位方法 | |
| JPS62173170A (ja) | 砥石車のツル−イング装置 | |
| WO1989008005A1 (fr) | Procede de detection de la force de poussee de la broche principale d'une machine-outil | |
| JPS6332592B2 (enExample) | ||
| JPH0929630A (ja) | 表面研削方法 | |
| US4820092A (en) | Touch sensing method and apparatus | |
| JPH11221757A (ja) | 回転加工工具を用いた加工方法及び加工装置 | |
| JP5565172B2 (ja) | 工作物表面位置変動測定方法および研削盤 | |
| JP3077994B2 (ja) | 電解ドレッシング研削装置 | |
| JPH10138200A (ja) | スライシング方法およびスライシング装置 | |
| JPS60213477A (ja) | 研削盤におけるびびり発生防止装置 | |
| JPH03228570A (ja) | 磁気軸受をスピンドルにもつ加工装置 | |
| JPH0329097Y2 (enExample) | ||
| JPH0112632B2 (enExample) | ||
| JP2004098250A (ja) | 両頭研削装置 | |
| JPH02274459A (ja) | 半導体ウェーハの自動平面研削方法及びその装置 | |
| JPS6179550A (ja) | 工作機械 | |
| JPS6347587B2 (enExample) | ||
| US11839946B2 (en) | Grinding machine tool with random eccentric orbital motion speed detection | |
| CN212470965U (zh) | 一种数控磨削设备 | |
| JP2000006013A (ja) | ポリッシング装置 | |
| JPH0255194B2 (enExample) | ||
| JPH0679623A (ja) | 回転体の接触検出装置 | |
| JPH04177136A (ja) | 転がり軸受による研削力、切削力測定装置 | |
| JPH0525630B2 (enExample) |