JPS63315598A - 気相合成ダイヤモンド膜のパタ−ニング方法 - Google Patents

気相合成ダイヤモンド膜のパタ−ニング方法

Info

Publication number
JPS63315598A
JPS63315598A JP14941787A JP14941787A JPS63315598A JP S63315598 A JPS63315598 A JP S63315598A JP 14941787 A JP14941787 A JP 14941787A JP 14941787 A JP14941787 A JP 14941787A JP S63315598 A JPS63315598 A JP S63315598A
Authority
JP
Japan
Prior art keywords
diamond film
mask
substrate
patterning
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14941787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449519B2 (enrdf_load_stackoverflow
Inventor
Kazuaki Kurihara
和明 栗原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14941787A priority Critical patent/JPS63315598A/ja
Publication of JPS63315598A publication Critical patent/JPS63315598A/ja
Publication of JPH0449519B2 publication Critical patent/JPH0449519B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14941787A 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法 Granted JPS63315598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14941787A JPS63315598A (ja) 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14941787A JPS63315598A (ja) 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法

Publications (2)

Publication Number Publication Date
JPS63315598A true JPS63315598A (ja) 1988-12-23
JPH0449519B2 JPH0449519B2 (enrdf_load_stackoverflow) 1992-08-11

Family

ID=15474659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14941787A Granted JPS63315598A (ja) 1987-06-16 1987-06-16 気相合成ダイヤモンド膜のパタ−ニング方法

Country Status (1)

Country Link
JP (1) JPS63315598A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184598A (ja) * 1989-01-10 1990-07-19 Kobe Steel Ltd 気相合成ダイヤモンド選択成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184598A (ja) * 1989-01-10 1990-07-19 Kobe Steel Ltd 気相合成ダイヤモンド選択成膜方法

Also Published As

Publication number Publication date
JPH0449519B2 (enrdf_load_stackoverflow) 1992-08-11

Similar Documents

Publication Publication Date Title
DE69132587T2 (de) Photolithographisches Verarbeitungsverfahren und Vorrichtung
JPH01112728A (ja) Ｘ線リソグラフィーマスク用ＳｉＣのマスク支持体の製造方法
JPH0319690B2 (enrdf_load_stackoverflow)
JPH02213118A (ja) 放射線リソグラフィーマスク用のｓｉｃマスク支持部材の製造方法
JP2753707B2 (ja) エツチング法
JPS63315598A (ja) 気相合成ダイヤモンド膜のパタ−ニング方法
JPS63285932A (ja) 安定なチッ化ホウ素を用いたｘ線リソグラフィーによるデバイス製造方法，そのマスク構造及びデバイス製造システム
JP2634183B2 (ja) ダイヤモンド結晶の形成方法
ATE136159T1 (de) Verfahren zum herstellen einer abgeschiedenen schicht, und verfahren zum herstellen einer halbleitervorrichtung
JP2683060B2 (ja) ダイヤモンド膜及びその製造法
JPS6376438A (ja) パタ−ン形成方法
GB2288272A (en) X-ray windows
JPH0345526B2 (enrdf_load_stackoverflow)
JP3350235B2 (ja) Ｘ線マスクの製造方法及びそれにより得られたｘ線マスク
JPS63303891A (ja) 気相合成ダイヤモンド膜のパタ−ニング方法
US4368215A (en) High resolution masking process for minimizing scattering and lateral deflection in collimated ion beams
JP3419583B2 (ja) ガリウム砒素基板における選択的結晶成長方法
JPH0475335A (ja) 原子加工法
JPS61245160A (ja) Ｘ線マスクの製造方法
JP2998336B2 (ja) 化合物半導体のエッチング方法および半導体構造の形成方法
JP3008466B2 (ja) ダイヤモンド微粉末を用いるダイヤモンド薄膜の選択成長法
JP3411413B2 (ja) Ｘ線マスクの製造方法
JPH03159223A (ja) Ｘ線マスクおよびその製造方法
JPH04223329A (ja) 微細パタ−ン形成方法および形成装置
JPH029123A (ja) 光励起エッチング方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees