JPS6331556B2 - - Google Patents
Info
- Publication number
- JPS6331556B2 JPS6331556B2 JP12856280A JP12856280A JPS6331556B2 JP S6331556 B2 JPS6331556 B2 JP S6331556B2 JP 12856280 A JP12856280 A JP 12856280A JP 12856280 A JP12856280 A JP 12856280A JP S6331556 B2 JPS6331556 B2 JP S6331556B2
- Authority
- JP
- Japan
- Prior art keywords
- processed
- mask
- shaft
- cap
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 8
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 15
- 239000000463 material Substances 0.000 description 8
- 238000003754 machining Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12856280A JPS5754274A (ja) | 1980-09-18 | 1980-09-18 | Mizotsukidoatsugatajikukenokakohoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12856280A JPS5754274A (ja) | 1980-09-18 | 1980-09-18 | Mizotsukidoatsugatajikukenokakohoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5754274A JPS5754274A (ja) | 1982-03-31 |
| JPS6331556B2 true JPS6331556B2 (enrdf_load_stackoverflow) | 1988-06-24 |
Family
ID=14987828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12856280A Granted JPS5754274A (ja) | 1980-09-18 | 1980-09-18 | Mizotsukidoatsugatajikukenokakohoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5754274A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499946A (ja) * | 1990-08-20 | 1992-03-31 | Sanko Control Kk | 砥石の切れ味測定方法及び装置 |
| AU2003211404A1 (en) * | 2002-02-28 | 2003-09-09 | Fujitsu Limited | Dynamic pressure bearing manufacturing method, dynamic pressure bearing, and dynamic pressure bearing manufacturing device |
| US8182982B2 (en) * | 2008-04-19 | 2012-05-22 | Rolith Inc | Method and device for patterning a disk |
-
1980
- 1980-09-18 JP JP12856280A patent/JPS5754274A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5754274A (ja) | 1982-03-31 |
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