JPS6331556B2 - - Google Patents

Info

Publication number
JPS6331556B2
JPS6331556B2 JP12856280A JP12856280A JPS6331556B2 JP S6331556 B2 JPS6331556 B2 JP S6331556B2 JP 12856280 A JP12856280 A JP 12856280A JP 12856280 A JP12856280 A JP 12856280A JP S6331556 B2 JPS6331556 B2 JP S6331556B2
Authority
JP
Japan
Prior art keywords
processed
mask
shaft
cap
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12856280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5754274A (ja
Inventor
Mamoru Tanaka
Ikunori Sakatani
Hiromi Sugi
Katsuhiko Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP12856280A priority Critical patent/JPS5754274A/ja
Publication of JPS5754274A publication Critical patent/JPS5754274A/ja
Publication of JPS6331556B2 publication Critical patent/JPS6331556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP12856280A 1980-09-18 1980-09-18 Mizotsukidoatsugatajikukenokakohoho Granted JPS5754274A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12856280A JPS5754274A (ja) 1980-09-18 1980-09-18 Mizotsukidoatsugatajikukenokakohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12856280A JPS5754274A (ja) 1980-09-18 1980-09-18 Mizotsukidoatsugatajikukenokakohoho

Publications (2)

Publication Number Publication Date
JPS5754274A JPS5754274A (ja) 1982-03-31
JPS6331556B2 true JPS6331556B2 (enrdf_load_stackoverflow) 1988-06-24

Family

ID=14987828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12856280A Granted JPS5754274A (ja) 1980-09-18 1980-09-18 Mizotsukidoatsugatajikukenokakohoho

Country Status (1)

Country Link
JP (1) JPS5754274A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0499946A (ja) * 1990-08-20 1992-03-31 Sanko Control Kk 砥石の切れ味測定方法及び装置
CN100396945C (zh) * 2002-02-28 2008-06-25 富士通株式会社 动压轴承的制造方法、动压轴承及动压轴承制造装置
US8182982B2 (en) * 2008-04-19 2012-05-22 Rolith Inc Method and device for patterning a disk

Also Published As

Publication number Publication date
JPS5754274A (ja) 1982-03-31

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