JPS6331390Y2 - - Google Patents
Info
- Publication number
- JPS6331390Y2 JPS6331390Y2 JP1980084241U JP8424180U JPS6331390Y2 JP S6331390 Y2 JPS6331390 Y2 JP S6331390Y2 JP 1980084241 U JP1980084241 U JP 1980084241U JP 8424180 U JP8424180 U JP 8424180U JP S6331390 Y2 JPS6331390 Y2 JP S6331390Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- contact
- semiconductor wafer
- etching
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920005989 resin Polymers 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- 229920002050 silicone resin Polymers 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 20
- 239000004065 semiconductor Substances 0.000 description 20
- 235000012431 wafers Nutrition 0.000 description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 19
- 229910052782 aluminium Inorganic materials 0.000 description 19
- 238000009792 diffusion process Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012806 monitoring device Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Wire Bonding (AREA)
- Multi-Conductor Connections (AREA)
- Weting (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980084241U JPS6331390Y2 (enrdf_load_stackoverflow) | 1980-06-18 | 1980-06-18 | |
| US06/185,439 US4338157A (en) | 1979-10-12 | 1980-09-09 | Method for forming electrical connecting lines by monitoring the etch rate during wet etching |
| EP80304609A EP0032028B1 (en) | 1979-10-12 | 1980-12-19 | Method and apparatus for forming electrical interconnections |
| DE8080304609T DE3071021D1 (en) | 1979-12-19 | 1980-12-19 | Method and apparatus for forming electrical interconnections |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980084241U JPS6331390Y2 (enrdf_load_stackoverflow) | 1980-06-18 | 1980-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5710737U JPS5710737U (enrdf_load_stackoverflow) | 1982-01-20 |
| JPS6331390Y2 true JPS6331390Y2 (enrdf_load_stackoverflow) | 1988-08-22 |
Family
ID=29446542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980084241U Expired JPS6331390Y2 (enrdf_load_stackoverflow) | 1979-10-12 | 1980-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331390Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-06-18 JP JP1980084241U patent/JPS6331390Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5710737U (enrdf_load_stackoverflow) | 1982-01-20 |
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