JPS63302401A - Magnetic recording and reproducing system - Google Patents
Magnetic recording and reproducing systemInfo
- Publication number
- JPS63302401A JPS63302401A JP62138722A JP13872287A JPS63302401A JP S63302401 A JPS63302401 A JP S63302401A JP 62138722 A JP62138722 A JP 62138722A JP 13872287 A JP13872287 A JP 13872287A JP S63302401 A JPS63302401 A JP S63302401A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- recording medium
- sialon
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 23
- 239000010408 film Substances 0.000 description 57
- 239000000758 substrate Substances 0.000 description 21
- 239000010409 thin film Substances 0.000 description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 16
- 229910052593 corundum Inorganic materials 0.000 description 12
- 229910001845 yogo sapphire Inorganic materials 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 229910003564 SiAlON Inorganic materials 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、磁気記録再生方式に関し、磁性膜の上にサイ
アロンでなる保護膜を形成した磁気記録媒体と、磁気記
録媒体との主摺動面をサイアロンで構成した磁気ヘッド
とを組合せることにより、両者の耐摩耗性を向上させる
ようにしたものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a magnetic recording and reproducing system, and relates to a magnetic recording medium in which a protective film made of sialon is formed on a magnetic film, and a main sliding mechanism between the magnetic recording medium and the magnetic recording medium. By combining it with a magnetic head whose surface is made of sialon, the wear resistance of both is improved.
〈従来の技術〉
磁気記録媒体の耐久性を向上させるための手段としては
、従来より、磁気記録層上に潤滑剤を塗布したり、有機
薄膜、ＳｉＯ２やＡｌ２Ｏ３等の酸化物薄膜、或いはＲ
ｈ（ロジウム）等の金属薄膜を形成する等の方法が既に
提案され、一応の成果が得られている。<Prior Art> Conventionally, methods for improving the durability of magnetic recording media include applying a lubricant to the magnetic recording layer, applying an organic thin film, an oxide thin film such as SiO2 or Al2O3, or using R.
Methods such as forming a thin film of metal such as h (rhodium) have already been proposed, and some results have been obtained.
〈発明が解決しようとする問題点〉
しかしながら、磁気記録再生の高速化、データの高速転
送化に伴い、磁気記録媒体及び磁気ヘッドの使用条件が
過酷になってきている。例えば、フレキシブル磁気ディ
スクにおいては、磁気記録媒体と磁気ヘッドとを、常に
荷重数グラム−数十グラムのもとに接触させた状態で、
ＪＩＳ Ｃ６２９０規格により３００万バス以上の耐久
性が要求されいる。このため、上述した従来坑術では、
このような過酷な条件下において、長期の耐久性を確保
することが困難になっている。<Problems to be Solved by the Invention> However, as magnetic recording and reproducing speeds increase and data transfer speeds increase, the operating conditions for magnetic recording media and magnetic heads are becoming harsher. For example, in a flexible magnetic disk, the magnetic recording medium and the magnetic head are always in contact with each other under a load of several grams to several tens of grams.
The JIS C6290 standard requires durability of 3 million buses or more. For this reason, in the conventional mining technique mentioned above,
Under such harsh conditions, it has become difficult to ensure long-term durability.
耐久性改善を目的とした技術としては、特開昭６１−１
７８７０２号公報に記載されたものが知られている。こ
の公知技術は、Ｇｏ−Ｃｒ酸化物の保護膜を形成した垂
直磁気記録媒体と、この垂直磁気記録媒体との主摺動面
をチタンカーバイト含有アルミナセラミック（Ａ１２０
３ ・ＴｉＣ）で構成した垂直磁気ヘッドとを組合せ
ることにより、耐久性を向上させるようにしたものであ
る。As a technology aimed at improving durability, JP-A-61-1
The one described in Japanese Patent No. 78702 is known. This known technology uses a perpendicular magnetic recording medium on which a Go-Cr oxide protective film is formed, and a titanium carbide-containing alumina ceramic (A120) on the main sliding surface of the perpendicular magnetic recording medium.
3.Durability is improved by combining it with a perpendicular magnetic head made of TiC).
しかしながら、特開昭６１−１７８７０２号に係る先行
技術には次のような問題点があった。However, the prior art disclosed in Japanese Unexamined Patent Publication No. 178702/1983 had the following problems.
（イ） Ａｌ２Ｏ，・ＴｉＣは、表面性が悪いため、媒
体との接触性が悪く、耐摩耗性の点でも問題がある。(a) Since Al2O,.TiC has poor surface properties, it has poor contact with the medium and also has problems in terms of wear resistance.
（ロ） Ａｌ２Ｏ３’ ＴｉＣは比抵抗が９Ｘ１０−３
Ω−ＣＩｌｌで導電性を有し、しかも、表面性が悪い。(b) Al2O3' TiC has a specific resistance of 9X10-3
It has conductivity of Ω-CIll and has poor surface properties.
このため、例えば薄膜磁気ヘッドを構成する場合、磁気
記録媒体との主摺動面を構成する基板の表面に、磁性膜
を直接に積層することができず、基板の表面をアルミナ
膜で覆う構造をとらなければならず、集積化工程が多く
なる。For this reason, when constructing a thin-film magnetic head, for example, it is not possible to directly laminate a magnetic film on the surface of the substrate that constitutes the main sliding surface with the magnetic recording medium, and a structure in which the surface of the substrate is covered with an alumina film is used. Therefore, the number of integration steps increases.
く問題点を解決するための手段〉
上述する従来の問題点を解決するため、本発明に係る磁
気記録再生方式は、Ｅｌ性膜の上にサイアロンでなる保
護膜を形成した磁気記録媒体と、磁気記録媒体との主摺
動面をサイアロンで構成した磁気ヘッドとの組合せを特
徴とする。Means for Solving the Problems> In order to solve the above-mentioned conventional problems, the magnetic recording and reproducing system according to the present invention includes a magnetic recording medium in which a protective film made of sialon is formed on an El film, It is characterized by a combination with a magnetic head whose main sliding surface with a magnetic recording medium is made of Sialon.
ここに、サイアロンとは、一般式
％式％）
で示され、窒化けい素５１３Ｎ４にＡ１と０が置換形に
固溶した固溶体である。Here, Sialon is represented by the general formula (%) and is a solid solution in which A1 and 0 are dissolved in a substituted form in silicon nitride 513N4.
く作用〉
サイアロンは潤滑性を有し、高硬度、かつ高靭性である
。従って、磁気記録媒体の磁性膜をサイアロンでなる保
護膜で覆うと共に、磁気ヘッドの主摺動面をサイアロン
によって構成することにより、媒体と磁気ヘッドとを高
速で相対８動させた場合でも、両者に傷が発生するのを
阻止し、耐久性を向上させることができる。Effect> Sialon has lubricating properties, high hardness, and high toughness. Therefore, by covering the magnetic film of the magnetic recording medium with a protective film made of Sialon and configuring the main sliding surface of the magnetic head with Sialon, even when the medium and the magnetic head are moved relative to each other at high speed, both This can prevent scratches from occurring and improve durability.
また、サイアロンは比抵抗の高い電気絶縁物であって、
しかも、ち密性を有し、表面性も良好である。このため
、例えは薄膜磁気ヘッドにおいては、基板に対して、ア
ルミナ膜等の下地層を介在させることなく、磁性膜を直
接に積層することができ、集積化工程の効率が向上する
。In addition, Sialon is an electrical insulator with high resistivity,
Moreover, it has compactness and good surface properties. Therefore, for example, in a thin film magnetic head, a magnetic film can be directly stacked on a substrate without intervening an underlying layer such as an alumina film, and the efficiency of the integration process is improved.
〈実施例１〉
第１図は本発明に係る垂直磁気記録再生方式の構成を示
す図で、１は磁気記録媒体、２は垂直薄膜磁気ヘッドで
ある。６ｎ気記録媒体１は非磁性基体１０１の片面また
は両面に、軟磁性膜１０２を形成すると共に、軟磁性膜
１０２の上に磁気記録層となる垂直異方性磁性膜１０３
を形成し、磁性膜１０３の上にサイアロンでなる保護膜
１０４を形成しである。サイアロンでなる保護膜１０４
は、例えば１００人の膜厚となるように形成する。<Embodiment 1> FIG. 1 is a diagram showing the configuration of a perpendicular magnetic recording/reproducing system according to the present invention, where 1 is a magnetic recording medium and 2 is a perpendicular thin film magnetic head. The 6n magnetic recording medium 1 has a soft magnetic film 102 formed on one or both sides of a non-magnetic substrate 101, and a perpendicular anisotropic magnetic film 103 serving as a magnetic recording layer on the soft magnetic film 102.
A protective film 104 made of sialon is formed on the magnetic film 103. Protective film 104 made of sialon
is formed to have a thickness of, for example, 100 people.
垂直薄膜磁気ヘッド２は、基板２１、下部磁性膜２２、
上部磁性膜２３、Ａｌ２Ｏ３保護膜２４、導体コイル２
５、フォトレジスト絶縁膜２６、Ａｌ２Ｏ３保護膜２７
及び軟磁性体２８等を備える。The vertical thin film magnetic head 2 includes a substrate 21, a lower magnetic film 22,
Upper magnetic film 23, Al2O3 protective film 24, conductor coil 2
5. Photoresist insulating film 26, Al2O3 protective film 27
and a soft magnetic material 28 and the like.
磁気記録媒体１との主摺動面を形成する基板２１は、サ
イアロンによって形成しである。そして、サイアロンで
なる基板２１の表面に、下地膜を介在させることなく、
下部磁性膜２２を直接形成しである。基板２１と共に、
Ａｌ２Ｏ３保護膜２４．２７もサイアロンで形成しても
よい。The substrate 21 forming the main sliding surface with the magnetic recording medium 1 is made of SiAlON. Then, without intervening a base film on the surface of the substrate 21 made of SiAlON,
The lower magnetic film 22 is directly formed. Together with the substrate 21,
The Al2O3 protective films 24 and 27 may also be formed of sialon.
下部磁性膜２２及び上部磁性ｌ１５ｊ２３はＮｉ−Ｆｅ
膜またはＧｏ−Ｚｒ−Ｎｂ膜等で構成されている。下部
磁性膜２２は、磁気記録媒体１との主摺動面となる基板
２１の端面に、先端部を臨ませたボール２２１と、この
ボール２２１に連続して後方に延ばして形成したヨーク
２２２ とを有し、ヨーク２２２の後端部に上部磁性膜
２３を結合させである。上部ｔｉｎ性膜２３は、先端部
２３１を下部磁性膜２２のボール２２１の端面より後退
させて、フォトレジスト絶縁＠２６の表面に形成しであ
る。The lower magnetic film 22 and the upper magnetic layer 115j23 are made of Ni-Fe.
It is composed of a film or a Go-Zr-Nb film. The lower magnetic film 22 includes a ball 221 whose tip end faces the end surface of the substrate 21 that becomes the main sliding surface with the magnetic recording medium 1, and a yoke 222 formed to extend rearward continuously from the ball 221. The upper magnetic film 23 is coupled to the rear end of the yoke 222. The upper tin film 23 is formed on the surface of the photoresist insulation @26 with the tip 231 set back from the end surface of the ball 221 of the lower magnetic film 22.
下部磁性膜２２の表面にはＡＩ、０３保護膜２４を形成
し、このＡｌ２Ｏ３保ｇＨｉ２４の上にフォトレジスト
絶縁膜２６によって覆われた導体コイル２５を、上部ｔ
ｉｎ性膜２３の結合部２３２を回るように、渦巻状に形
成しである。そして、全体をＡｌ２Ｏ３保護膜２７で覆
い、更に、Ａｌ２Ｏ３保護１１ｉ２７の上に磁束復帰路
となるフェライト等の軟磁性体２８を接着等の手段によ
って固着しである。An AI, 03 protective film 24 is formed on the surface of the lower magnetic film 22, and a conductor coil 25 covered with a photoresist insulating film 26 is placed on top of this Al2O3 protective film 24.
It is formed in a spiral shape so as to go around the joint portion 232 of the in-type film 23. Then, the entire structure is covered with an Al2O3 protective film 27, and a soft magnetic material 28 such as ferrite, which serves as a magnetic flux return path, is fixed onto the Al2O3 protective film 27 by means of adhesive or the like.
〈実施例２〉
第２図は面内記録再生方式の構成を示す。１は６Ｂ気記
録媒体、２は面内記録再生用の薄膜磁気ヘッドである。<Embodiment 2> FIG. 2 shows the configuration of a longitudinal recording/reproducing method. 1 is a 6B recording medium, and 2 is a thin film magnetic head for longitudinal recording/reproduction.
磁気記録媒体１は非磁性基体１０１の上に面内磁気記録
層となる磁性膜１０３を形成し、この磁性膜１０３の上
にサイアロンでなる保護膜１０４を形成しである。The magnetic recording medium 1 has a magnetic film 103, which serves as an in-plane magnetic recording layer, formed on a non-magnetic substrate 101, and a protective film 104 made of sialon is formed on this magnetic film 103.
面内記録再生用の薄膜磁気ヘッド２も、第１図の垂直記
録再生用の薄膜磁気ヘッドと同様に、基板２１をサイア
ロンで形成しである。垂直記録再生用の薄膜磁気ヘッド
との違いは、上部磁性膜２３の先端部２３１と、下部磁
性賜２２の先端部２２１との間にＡｌ２Ｏ３層間絶縁２
４による磁気ギャップを形成させたこと、磁束復帰路用
の軟磁性体を必要としないこと等である。The thin film magnetic head 2 for in-plane recording and reproduction also has a substrate 21 made of SiAlON, similar to the thin film magnetic head for perpendicular recording and reproduction shown in FIG. The difference from a thin film magnetic head for perpendicular recording and reproduction is that an Al2O3 interlayer insulator 2 is provided between the tip 231 of the upper magnetic film 23 and the tip 221 of the lower magnetic film 22.
4, a magnetic gap is formed, and a soft magnetic material for a magnetic flux return path is not required.
表１は磁気記録媒体と薄膜磁気ヘッドとの組合せ構成例
の耐久性を示している。表１において、ヘッドＨ１は基
板２１をサイアロンで構成したもの、ヘッドＨ２は基板
２１をＡｌ２Ｏ３・ＴｉＣで構成したもの、ヘッドＨ３
は基板２１を結晶化ガラスで構成したもの、ヘッドＨ４
は基板２１をＭｎ−Ｚｎフェライトで構成したもの、ヘ
ッドＨｓ、Ｈａは基板２１を複合酸化物で構成したもの
、ヘッドＨ７は基板２１をチタン酸カルシュウムで構成
したもの、Ｈ６は基板２１をチタン酸バリウムで構成し
たものをそれぞれ示している。Table 1 shows the durability of an example of a combination configuration of a magnetic recording medium and a thin film magnetic head. In Table 1, the head H1 has a substrate 21 made of SiAlON, the head H2 has a substrate 21 made of Al2O3/TiC, and the head H3 has a substrate 21 made of SiAlON.
The substrate 21 is made of crystallized glass, and the head H4
The head Hs and Ha have a substrate 21 made of composite oxide, the head H7 has a substrate 21 made of calcium titanate, and the head H6 has a substrate 21 made of titanate. Each one is shown as being composed of barium.
次に、磁気記録媒体Ａは保護膜１０４をサイアロンによ
って構成したもの、磁気記録媒体Ｂは保護膜１０４をＡ
ｌ２Ｏ３で構成したもの、磁気記録媒体Ｃは保護膜１０
４を持たないものをそれぞれ示している。Next, magnetic recording medium A has a protective film 104 made of sialon, and magnetic recording medium B has a protective film 104 made of sialon.
The magnetic recording medium C, which is composed of l2O3, has a protective film 10.
Each item that does not have 4 is shown.
耐久試験は磁気記録媒体ＡＮＣを３００ｒｐｍで回転さ
せ、磁気記録媒体Ａ−Ｃと薄膜磁気ヘッドＨ１〜Ｈ８と
の相対的摺動を３００万パス行なった。耐久性評価は磁
気記録媒体Ａ−Ｃと薄膜磁気ヘッドＨ１〜Ｈ６の表面を
光学顕微鏡で観察し、傷の発生程度で行なった。表中、
全く傷がないものは◎、数本の浅い傷が生じたものは○
、数本の深い傷が生じたものは△、著しく傷ついたもの
は×及び××、傷はつきにくいが摩耗したものは■で示
した。なお、磁気記録媒体Ａ−Ｃの表面にはフロン系の
液体潤滑剤を塗布した。In the durability test, the magnetic recording medium ANC was rotated at 300 rpm, and 3 million passes of relative sliding between the magnetic recording medium AC and the thin film magnetic heads H1 to H8 were performed. The durability was evaluated by observing the surfaces of the magnetic recording media A-C and the thin-film magnetic heads H1 to H6 using an optical microscope, and determining the degree of scratches. In the table,
Items with no scratches are ◎, items with a few shallow scratches are ○
, Those with several deep scratches are indicated by △, those with significant scratches are indicated by × and XX, and those that are not easily scratched but are worn are indicated by ■. Note that a fluorocarbon-based liquid lubricant was applied to the surfaces of the magnetic recording media A to C.
表 １
表１に示すように、本発明に係る磁気記録媒体Ａとヘッ
ドＨ１との組合せの場合、媒体とヘッド□ともに傷が発
生せず、耐久性を向上させる上で、きわめて有効である
ことが解る。この組合せに対しては、前述のＪＩＳ Ｃ
６２９０規格を満足できた。これに対して、本発明に係
るヘッドＨ１と従来の磁気記録媒体Ｂ、Ｃとの組合せ、
従来のヘッドＨ２〜Ｈａと本発明に係る磁気記録媒体Ａ
及び従来の磁気記録媒体Ｂ、Ｃの組合せでは、媒体また
はヘッドの何れかに傷が発生して耐久性が低下している
。Table 1 As shown in Table 1, in the case of the combination of magnetic recording medium A and head H1 according to the present invention, both the medium and the head □ are free from scratches and are extremely effective in improving durability. I understand. For this combination, the above-mentioned JIS C
6290 standard was satisfied. On the other hand, a combination of the head H1 according to the present invention and conventional magnetic recording media B and C,
Conventional heads H2 to Ha and magnetic recording medium A according to the present invention
In the combination of conventional magnetic recording media B and C, scratches occur on either the medium or the head, resulting in reduced durability.
次に、表２にサイアロンの比抵抗（Ω−ｃｍ）、面粗度
（入）及び密度（ｇ／ｃｍ３）を、Ａｌ２Ｏ３’ Ｔｔ
Ｃ１結晶化ガラス、Ｍｎ−Ｚｎ系フェライト、及び複合
酸化物のそれと比較して示しである。Next, in Table 2, the specific resistance (Ω-cm), surface roughness (in), and density (g/cm3) of Sialon are shown in Table 2.
It is shown in comparison with those of C1 crystallized glass, Mn-Zn ferrite, and composite oxide.
表 ２
表２に示すように、サイアロンは比抵抗が１ｏ１０（Ω
−ｃｍ）と著しく大きく、比抵抗が９×ｉｏ−’（Ω−
ｃｍ）のＡｌ２Ｏ３・ＴｉＣ等と異なって、電気絶縁物
である。更に、面粗度く１００人で、Ａｌ２Ｏ３・Ｔｉ
ｅ等の面粗度く２ｏＯÅ以上よりも、小さく、表面性が
良好である。このため、サイアロンでなる基板２１に対
しては、第１図及び第２図に示す如く、アルミナ膜等の
下地層を介在させることなく、磁性膜３を直接に積層す
ることができ、集積化工程の効率が向上する。Table 2 As shown in Table 2, Sialon has a specific resistance of 1o10 (Ω
-cm), and the specific resistance is 9×io-'(Ω-
cm) Unlike Al2O3・TiC, etc., it is an electrical insulator. Furthermore, the surface roughness was reduced by 100 people, and Al2O3・Ti
The surface roughness such as e is smaller than 2oOÅ or more, and the surface properties are good. Therefore, as shown in FIGS. 1 and 2, the magnetic film 3 can be directly laminated on the substrate 21 made of sialon without intervening an underlying layer such as an alumina film, resulting in an integrated structure. Improves process efficiency.
〈発明の効果〉
以上述べたように、本発明に係る磁気記録再生方式は、
磁性膜の上にサイアロンでなる保護膜を形成した磁気記
録媒体と、前記磁気記録媒体との主摺動面をサイアロン
で構成した磁気ヘッドとの組合せを特徴とするから、次
のような効果が得られる。<Effects of the Invention> As described above, the magnetic recording and reproducing method according to the present invention has the following effects:
Since it is characterized by the combination of a magnetic recording medium in which a protective film made of SiAlON is formed on a magnetic film, and a magnetic head in which the main sliding surface between the magnetic recording medium and the magnetic recording medium is made of SiAlON, the following effects can be achieved. can get.
（ａ ） １ｉｉｉ気記録媒体と磁気ヘッドの耐久性、
耐摩耗性を向上させることができる。(a) Durability of the 1III recording medium and magnetic head,
Abrasion resistance can be improved.
（ｂ）サイアロンの高い電気絶縁性、ち密性、及び、高
い表面性を利用して、基板に対して、下地層を介在させ
ることなく、磁性膜を直接に積層し、集積化工程の効率
を向上させた薄膜磁気ヘッドを提供できる。(b) Utilizing Sialon's high electrical insulation, compactness, and high surface properties, a magnetic film can be directly stacked on the substrate without an intervening underlayer, increasing the efficiency of the integration process. An improved thin film magnetic head can be provided.
第１図は垂直記録再生用として使用される本発明に係る
薄膜磁気ヘッドの断面図、第２図は面内記録再生用とし
て使用される本発明に係る薄膜磁気ヘッドの要部断面図
である。
１・・・磁気記録媒体 １０３ ・・・磁性膜１０
４ ・・・サイアロンでなる保護膜２・・・磁気ヘッ
ド
２１・・サイアロンでなる基板
２２・・・下部磁性膜 ２３・・・上部磁性膜２５、
、、導体コイル ２６・・・絶縁膜第１図
第２図FIG. 1 is a cross-sectional view of a thin-film magnetic head according to the present invention used for perpendicular recording and reproducing, and FIG. 2 is a cross-sectional view of essential parts of a thin-film magnetic head according to the present invention used for longitudinal recording and reproducing. . 1... Magnetic recording medium 103... Magnetic film 10
4... Protective film 2 made of sialon... Magnetic head 21... Substrate 22 made of sialon... Lower magnetic film 23... Upper magnetic film 25,
,,Conductor coil 26...Insulating film Fig. 1 Fig. 2
Claims (1)
磁気記録媒体と、前記磁気記録媒体との主摺動面をサイ
アロンで構成した磁気ヘッドとの組合せを特徴とする磁
気記録再生方式。(1) A magnetic recording and reproducing system characterized by a combination of a magnetic recording medium in which a protective film made of sialon is formed on a magnetic film, and a magnetic head in which the main sliding surface with the magnetic recording medium is made of sialon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62138722A JPS63302401A (en) | 1987-06-02 | 1987-06-02 | Magnetic recording and reproducing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62138722A JPS63302401A (en) | 1987-06-02 | 1987-06-02 | Magnetic recording and reproducing system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63302401A true JPS63302401A (en) | 1988-12-09 |
Family
ID=15228616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62138722A Pending JPS63302401A (en) | 1987-06-02 | 1987-06-02 | Magnetic recording and reproducing system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63302401A (en) |
-
1987
- 1987-06-02 JP JP62138722A patent/JPS63302401A/en active Pending
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