JPS58150122A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPS58150122A
JPS58150122A JP3205582A JP3205582A JPS58150122A JP S58150122 A JPS58150122 A JP S58150122A JP 3205582 A JP3205582 A JP 3205582A JP 3205582 A JP3205582 A JP 3205582A JP S58150122 A JPS58150122 A JP S58150122A
Authority
JP
Japan
Prior art keywords
thin film
film
recording medium
magnetic
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3205582A
Other languages
Japanese (ja)
Other versions
JPH0618054B2 (en
Inventor
Kazuhiko Yamada
一彦 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57032055A priority Critical patent/JPH0618054B2/en
Publication of JPS58150122A publication Critical patent/JPS58150122A/en
Publication of JPH0618054B2 publication Critical patent/JPH0618054B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination

Abstract

PURPOSE:To obtain a magnetic head which has improved resistance to abrasion, excellent mechanical properties and extremely high reliability, by forming a thin film consisting of materials having a lubricating effect on the surface of said head facing magnetic recording media. CONSTITUTION:A thin film transducer 23 is formed on the trailing edge part of a slider 21, and further a protective film 24 consisting of an insulation layer is formed on the transducer 23. Thereafter, a floating surface 22 to face recording media is polished to obtain prescribed pole height, and a thin film 25 having a lubricating effect, such as MoS2, C, WS2, BN or the like is formed on the surface 22 by using a sputtering method or the like, whereby a thin film head is constituted. The thickness of the film 25 which is formed on said surface 22 and consists of the material having a lubricating effect is about 200Angstrom -800Angstrom .

Description

【発明の詳細な説明】 本発明は磁気ディスク装置郷に用いられる磁気ヘッドに
関するものである。この磁気ヘッドは従来バルクヘッド
が用いられていたが近年、薄膜ヘッドが実用化されつつ
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head used in a magnetic disk device. Conventionally, a bulk head has been used as this magnetic head, but in recent years, thin film heads have been put into practical use.

以下の説明においては、この薄膜へ、ドと磁気ディスク
装置との組合せを念111において説明を加える。この
様な薄膜へ、ドは、周波数特性が優れており、半導体テ
クノロジーに基づく製造プロセスが適用される為一括生
産による低価格化が可能であり、しかもヘッドのトラ、
り幅も微細化できる為高トラツク密度記録が可能になる
など多くの長所を持ち、今後の^記録密度化に大きな役
割を果すと考えられる。
In the following description, the combination of this thin film, disk drive, and magnetic disk device will be explained at 111. This type of thin film has excellent frequency characteristics, and because a manufacturing process based on semiconductor technology is applied, it is possible to lower the price by bulk production, and the head truck,
It has many advantages, such as the ability to miniaturize the width of the track, making it possible to record at high track density, and is thought to play a major role in increasing recording density in the future.

仁の様な薄膜ヘッドはスライダー、薄膜トランスデユー
サ−1および絶縁層よ構成る保護膜とから構成されるが
、近年実用化されつつある薄膜ヘッドはスライダー基板
上に直接薄膜トランスデー−サーを形成する構造が主流
となっている。第1図に、この様な薄膜へ、ドの一例を
示す。
A thin-film head like the one shown in the photo is composed of a slider, a thin-film transducer 1, and a protective film composed of an insulating layer, but thin-film heads that have been put into practical use in recent years have a thin-film transducer directly mounted on the slider substrate. The structure that forms is the mainstream. FIG. 1 shows an example of such a thin film.

第1図においてスライダー110)レーリンダエッヂ部
に薄膜トランスデユーサ−13が形成されている。又、
14は薄膜トランスデユーサ−13を保躾する丸めの保
護膜であ〉約20〜30μm程度の厚さのものである。
In FIG. 1, a thin film transducer 13 is formed at the edge of a slider 110). or,
14 is a round protective film for protecting the thin film transducer 13 and has a thickness of about 20 to 30 μm.

12は記録媒体との対向面を形成するスライダー気体軸
受向で記録媒体の間に薄膜の潤滑空気膜を形成し浮揚す
るもので、その浮上量は現在の磁気ディスク装置では0
.35μm11度となっており、更に小さな浮上量とな
る傾向にある。この浮動へ、トスライダーの機械的特性
については周知の如く、記録媒体との動的な追従性を改
善維持する為空気膜剛性を高める必要があシ、現用の薄
膜ヘッドにおいては空mJ性80に#f /閣程度が得
られておシ、へ、ドへの押圧力は159fとなっている
。しかし他方最近の大容量磁気ディスク装置において祉
、その機構を簡便なものにするという観点から、記録媒
体の起動停止時にスライダーが、記録媒体に対して直接
摺動接触することを許容する、所請コンタクトスタート
スト、プ方式(以下C8S方式と略記)が採用されてい
もその為、スライダーの記録媒体とのC8S時における
耐摩擦摩耗性を確保するのが極めて重要な問題である。
Reference numeral 12 refers to a slider that forms a surface facing the recording medium and is oriented toward the gas bearing, forming a thin lubricating air film between the recording medium and levitating it, and its flying height is 0 in current magnetic disk drives.
.. The flying height is 35 μm and 11 degrees, and the flying height tends to be even smaller. As is well known, regarding the mechanical properties of the toslider, it is necessary to increase the stiffness of the air film in order to improve and maintain the dynamic tracking ability with the recording medium. #f/kaku level is obtained, and the pressure on oshi, he, and de is 159f. However, from the viewpoint of simplifying the mechanism of recent large-capacity magnetic disk drives, it is necessary to allow the slider to come into direct sliding contact with the recording medium when the recording medium starts and stops. Even if the contact start strike method (hereinafter abbreviated as C8S method) is adopted, it is therefore extremely important to ensure the friction and wear resistance of the slider with the recording medium during C8S.

一方、前述のC8S時における耐摩擦摩耗性を確保する
為に従来、記録媒体上に保鏝膜を形成しえり、あるいは
種々の固体、あるいは液体の潤滑剤を記録媒体上に塗布
していえ。しかし十分とは言えず時として記録媒体とへ
、ドとが接触クラ、シュし、記録装置としての機能が損
われることがあり丸。しかも磁気へ、ドに対しては耐摩
擦摩耗性を確保する為の積極的な方策が何らとられてい
ないのが実情であり九。       、以上述べてき
た事情は従来のバルクへ、ドにおいても全く同様である
。しかも記録媒体が例えば磁気テープあるいは70.ピ
ーディスクの如き可撓性媒体の場合は、磁気へ、ド即ち
バルクヘッドあるいは薄膜へ、トド媒体面と接触摺動す
る為、より一層耐摩擦摩耗性の改善が必要であり、磁気
ディスク装置の場合より事情は格段ときびしいも0があ
った。
On the other hand, in order to ensure friction and wear resistance during the above-mentioned C8S, conventionally, a protective film has been formed on the recording medium, or various solid or liquid lubricants have been applied on the recording medium. However, this is not enough and sometimes the contact between the recording medium and the dots may crack, causing the function of the recording device to be impaired. Moreover, the reality is that no active measures have been taken to ensure friction and wear resistance against magnetism and deterioration. The above-mentioned circumstances are exactly the same in conventional bulk and deformation processes. Moreover, the recording medium is, for example, a magnetic tape or 70. In the case of flexible media such as disks, it is necessary to further improve the friction and wear resistance of magnetic disk devices, as they slide in contact with the surface of the magnetic disk, that is, the bulkhead or thin film. The circumstances were much more severe than the case.

本発明は以上の点に鑑み、磁気へ、ドの実装Kかかわる
機械的諸問題、特に耐摩擦摩耗性を解決し、信頼性の高
い磁気へ、ドを提供することを目的とするものである。
In view of the above points, it is an object of the present invention to solve various mechanical problems related to the mounting of magnetic devices, especially friction and wear resistance, and to provide a highly reliable magnetic device. .

本発明によれば磁気記録媒体に情報を書込み読出す磁気
へ、ドにおいて前記磁気記録媒体との対向面上に潤滑作
用を有する物質から成る薄膜が成膜されていることを特
徴とする磁気ヘッドが得られる。
According to the present invention, a magnetic head for writing and reading information on a magnetic recording medium is characterized in that a thin film made of a substance having a lubricating action is formed on the surface facing the magnetic recording medium at the magnetic field. is obtained.

以下、本発明の実施料について第2図を参照しながら説
明する。第2図においてスライダー21のトレーリング
エッヂ部に11I膜トランスデユーサ−23が形成°さ
れ、更に絶縁層より成る保饅膜24が前記薄膜トランス
デユーサ−23上に成膜される。その後、記録媒体との
対向面となる浮揚面22の研磨が行なわれ所定のポール
ハイドを得だ後に、Mo5g、CXWS意、BNなどの
潤滑作用を持つ物質から成る薄膜25を、スパッタリン
グ法などを用いて前述の浮揚面22上に成膜し、薄膜へ
、ドが構成されている。ここで、浮揚面22上に成膜さ
れる前記潤滑作用を持つ物、質から成る薄膜25の膜厚
は200Xから800λ程度である。
Hereinafter, the license fee of the present invention will be explained with reference to FIG. In FIG. 2, an 11I film transducer 23 is formed on the trailing edge portion of the slider 21, and a protective film 24 made of an insulating layer is further formed on the thin film transducer 23. Thereafter, the floating surface 22, which faces the recording medium, is polished to obtain a predetermined pole hide, and then a thin film 25 made of a lubricating substance such as Mo5g, CXWS, BN, etc. is applied by sputtering or the like. A film is formed on the above-mentioned floating surface 22 using the above-mentioned method, and a thin film is formed. Here, the thickness of the thin film 25 formed on the floating surface 22 and made of the substance having a lubricating effect is about 200X to 800λ.

この様な構造を有する薄膜ヘッドにおいては、前述の通
り薄膜へ、ド自体に潤滑作用を有する膜が成膜されてい
る為、記録媒体とのC8S時における耐摩擦摩耗性が改
善されることとなる。しかも配録媒体上に塗布された固
体あるいは液体の潤滑剤との相乗効果が期待できる為、
大幅な耐摩擦摩耗性の改善が達成されることとなる。更
KX藺述の潤滑作用を持つ物質から成る薄膜25によシ
薄膜トラ/スデ、−サー23の軟磁性体の浮揚面側端面
が被覆される為、記録媒体とのC8S時における機械的
衝撃に破損の防止が可能とな夛、又前述の軟磁性体が直
接外気に露出することがない為、耐食性が改善され腐食
による軟磁性体の特性の劣化が抑制され、へ、ド効率の
低下を防止できるという利点もある。第2図の実施例は
薄膜へ、ドについてのものであるが従来のバルクへ、ド
に対しても媒体との対向面研磨後に潤滑作用を有する薄
膜を形成することにより同様な効果が期待できる。
In a thin film head having such a structure, as mentioned above, a film having a lubricating effect is formed on the thin film itself, so that the friction and wear resistance during C8S with the recording medium is improved. Become. Furthermore, synergistic effects can be expected with the solid or liquid lubricant applied to the recording medium.
A significant improvement in friction and wear resistance will be achieved. Furthermore, since the thin film 25 made of a substance having a lubricating effect as described above covers the end surface of the floating surface of the soft magnetic material of the thin film tracker/strip 23, the mechanical strength during C8S with the recording medium is covered. In addition, since the soft magnetic material mentioned above is not directly exposed to the outside air, corrosion resistance is improved and the deterioration of the properties of the soft magnetic material due to corrosion is suppressed, which improves the efficiency of heating. There is also the advantage of being able to prevent deterioration. The embodiment shown in Fig. 2 is for a thin film, but the same effect can be expected for conventional bulk or do by forming a thin film with a lubricating effect after polishing the surface facing the medium. .

又、記録媒体については磁気ディスクに限るものではな
く、磁気テープや70.ピーディスクの如き可撓性媒体
用の磁気ヘッドについても本発明が適用できることは明
らかである。
Furthermore, the recording medium is not limited to magnetic disks, but may include magnetic tape and 70. It is clear that the present invention is also applicable to magnetic heads for flexible media such as disks.

以上、述べてきた様に本発明によれば記碌媒体に対する
耐摩擦摩耗性の改善により機械的特性が優れた信頼性の
極めて高い磁気ヘッドが提供されることとなり、本発明
のもつ工業的意義は極めて大きいと考えられる。
As described above, according to the present invention, an extremely reliable magnetic head with excellent mechanical properties due to improved friction and wear resistance for recording media is provided, and the present invention has industrial significance. is considered to be extremely large.

なお、飼滑作用を有する物質から成る薄膜による磁気ヘ
ッドの電磁変換特性の劣化は前述の通りたかだか200
X〜5oots度の膜厚であるので実用上問題はない。
As mentioned above, the deterioration of the electromagnetic conversion characteristics of the magnetic head due to the thin film made of a substance that has a lubricant effect is at most 200%.
Since the film thickness is about X to 5 oots, there is no problem in practical use.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の磁気ヘッド、特に薄膜ヘッドの概略構成
図、又、第2図は本発明による薄膜ヘッドの概略構成図
である。
FIG. 1 is a schematic diagram of a conventional magnetic head, particularly a thin film head, and FIG. 2 is a schematic diagram of a thin film head according to the present invention.

Claims (3)

【特許請求の範囲】[Claims] (1)磁気記録媒体に情報を書込み読出す磁気ヘッドに
おいて、前記磁気記録媒体との対向面上に、潤滑作用を
有する物質から成る薄膜が成膜されていることを%黴と
する磁気ヘッド。
(1) A magnetic head for writing and reading information on a magnetic recording medium, in which a thin film made of a substance having a lubricating effect is formed on the surface facing the magnetic recording medium.
(2)磁気ヘッドが集積化薄膜技術を用いて形成される
薄膜トランスデユーサ−を有することを特徴とする特許
請求の範囲第1項記載の磁気ヘッド。
(2) A magnetic head according to claim 1, characterized in that the magnetic head has a thin film transducer formed using integrated thin film technology.
(3)潤滑作用を有する物質がMo5s、 C,W3鵞
、BNのいずれかであることを特徴とする特許請求の範
囲第1項乃至第2項記載の磁気ヘッド。
(3) The magnetic head according to any one of claims 1 to 2, wherein the substance having a lubricating action is any one of Mo5s, C, W3, and BN.
JP57032055A 1982-03-01 1982-03-01 Magnetic head Expired - Lifetime JPH0618054B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57032055A JPH0618054B2 (en) 1982-03-01 1982-03-01 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57032055A JPH0618054B2 (en) 1982-03-01 1982-03-01 Magnetic head

Publications (2)

Publication Number Publication Date
JPS58150122A true JPS58150122A (en) 1983-09-06
JPH0618054B2 JPH0618054B2 (en) 1994-03-09

Family

ID=12348180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57032055A Expired - Lifetime JPH0618054B2 (en) 1982-03-01 1982-03-01 Magnetic head

Country Status (1)

Country Link
JP (1) JPH0618054B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2597247A1 (en) * 1986-04-11 1987-10-16 Thomson Csf METHOD FOR MAKING A MECHANICAL PROTECTION LAYER FOR MAGNETIC RECORDING / READING HEAD AND RECORDING / READING MAGNETIC HEAD USING THE SAME
US5175658A (en) * 1990-12-27 1992-12-29 International Buiness Machines Corporation Thin film magnetic head having a protective coating and method for making same
US5231613A (en) * 1990-01-19 1993-07-27 Sharp Kabushiki Kaisha Magneto-optical recording device
US5271802A (en) * 1990-12-27 1993-12-21 International Business Machines Corporation Method for making a thin film magnetic head having a protective coating
US5386400A (en) * 1990-01-19 1995-01-31 Sharp Kabushiki Kaisha Magneto-optical head device having a lubricated member
WO1998010115A1 (en) * 1996-09-03 1998-03-12 Monsanto Company Silicon-doped diamond-like carbon coatings for magnetic transducers and for magnetic recording media
US5864452A (en) * 1994-08-03 1999-01-26 Sanyo Electric Co., Ltd. Thin-film magnetic head and method of forming carbon film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621A (en) * 1979-06-15 1981-01-06 Fujitsu Ltd Forming method of protective film for thin film magnetic head floating surface
JPS5616669U (en) * 1979-07-18 1981-02-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621A (en) * 1979-06-15 1981-01-06 Fujitsu Ltd Forming method of protective film for thin film magnetic head floating surface
JPS5616669U (en) * 1979-07-18 1981-02-13

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2597247A1 (en) * 1986-04-11 1987-10-16 Thomson Csf METHOD FOR MAKING A MECHANICAL PROTECTION LAYER FOR MAGNETIC RECORDING / READING HEAD AND RECORDING / READING MAGNETIC HEAD USING THE SAME
US4849842A (en) * 1986-04-11 1989-07-18 Thomson-Csf Method for the manufacture of a mechanically shielding layer for a magnetic read/write head, and magnetic read/write head using this method
US5231613A (en) * 1990-01-19 1993-07-27 Sharp Kabushiki Kaisha Magneto-optical recording device
US5386400A (en) * 1990-01-19 1995-01-31 Sharp Kabushiki Kaisha Magneto-optical head device having a lubricated member
EP0767457A3 (en) * 1990-01-19 1998-09-30 Sharp Kabushiki Kaisha Magneto-optical recording device
US5175658A (en) * 1990-12-27 1992-12-29 International Buiness Machines Corporation Thin film magnetic head having a protective coating and method for making same
US5271802A (en) * 1990-12-27 1993-12-21 International Business Machines Corporation Method for making a thin film magnetic head having a protective coating
US5864452A (en) * 1994-08-03 1999-01-26 Sanyo Electric Co., Ltd. Thin-film magnetic head and method of forming carbon film
WO1998010115A1 (en) * 1996-09-03 1998-03-12 Monsanto Company Silicon-doped diamond-like carbon coatings for magnetic transducers and for magnetic recording media

Also Published As

Publication number Publication date
JPH0618054B2 (en) 1994-03-09

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