JPS58150123A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS58150123A JPS58150123A JP3205782A JP3205782A JPS58150123A JP S58150123 A JPS58150123 A JP S58150123A JP 3205782 A JP3205782 A JP 3205782A JP 3205782 A JP3205782 A JP 3205782A JP S58150123 A JPS58150123 A JP S58150123A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- transducer
- magnetic head
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は磁気ディスク装置等に用いられる薄膜磁気ヘッ
ドに関するものである０−′
このＡｌｌヘッドは、周波数特性が優れてお゛す、半導
体テクノロジーに基づく製造プロセスが適用される為一
括生産による低価格化が可能であり、しかもヘッドのト
ラック幅も微細化できる為高トラック１度記録が可能化
なるなどの長所を持ち、命後の高配鍮！Ｉｆ化に大赤な
役割を果すと考えられる＠仁の＠ｑ薄膜へシトは、スラ
イダー、薄膜トランスデユーサ−、および絶縁層より成
る保−属とから構成春れるが、近岨爽用化ξれつつある
薄膜へラドはスライダー基板上化直線薄膜トランスデ、
−デーを形成する構造が主＃ｌとなっている０ｍ １１
１Ｊ（、この様な趣腹ヘッドの一例を示す・第１ＩＩに
おいてスライダー１１のトレーりンダエッヂ都に薄膜ト
ランスデ島−デーロが絶縁層１５を介して形成されてい
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin-film magnetic head used in magnetic disk drives, etc. This All-in-One head is manufactured using a manufacturing process based on semiconductor technology and has excellent frequency characteristics. Because of this, it is possible to lower the price through bulk production, and because the track width of the head can be made finer, it is possible to record once on a high track. The thin film structure of @jin, which is thought to play a major role in the development of If, is composed of a slider, a thin film transducer, and a protective layer consisting of an insulating layer, but the ξ The thin film that is being transferred is a linear thin film transducer on the slider substrate,
-0m where the structure forming the data is the main #l 11
1J (showing an example of such a head) In 1st II, a thin film transducer is formed on the trailing edge of the slider 11 with an insulating layer 15 interposed therebetween.
又、１４は薄膜トランスデ暴−サ−〇を保膿する為の保
−膜であり約２０〜ｌＯｊＩｍ＠ｊｉの厚さのものであ
る◎ルはスライダー気体軸受画で配鍮媒体の闘に薄膜の
潤滑空気膜を形威し浮揚するもので、その浮上量は現在
では（Ｌ３ＪｉＪ１ａａ＠度となっておりｔ更に小さな
浮上量となる傾角にある◎この浮動へ！トスライダーの
機械的特性については周知の如く、記録媒体上の動的な
追従性を改譬維持する為空気膜剛性を高める必豪があり
、堆層の薄膜へ！ドにおいては空気膜剛性８０に４ｆ／
■程度が得られて詣り、ヘッドへの押圧力はｌ５ｆｆと
なっている。しかし他方最近の大容量磁気ディスク装置
においては、その機構を簡便なものにするという観点か
ら記録媒体の起動停止時にスライダーが、記録媒体に対
して直＊＊動接触することを許容する０所謂コンタクト
スタ一トストツプ方式（以下ｃ８８方式と略記）が採用
されている。その為、スライダーの記録媒体との０８８
時における耐摩擦摩耗性を確保するのが極めて重要な問
題である。In addition, 14 is a retaining membrane for retaining the thin film transducer 〇, and it has a thickness of about 20 to 1 OjIm@ji. The floating amount is currently (L3JiJ1aa@degree), and it is at an inclination angle that makes the floating amount even smaller ◎ To this floating! Regarding the mechanical characteristics of the Toslider, As is well known, in order to maintain dynamic followability on a recording medium, it is necessary to increase the stiffness of the air film, and in order to maintain the dynamic followability on the recording medium, it is necessary to increase the stiffness of the air film to 80 to 4 f/.
The pressure on the head is 15ff. On the other hand, in order to simplify the mechanism of recent large-capacity magnetic disk drives, so-called zero contact is used, which allows the slider to come into direct** moving contact with the recording medium when the recording medium starts and stops. A start-stop method (hereinafter abbreviated as the C88 method) is adopted. Therefore, 088 with the recording medium of the slider
It is extremely important to ensure friction and wear resistance over time.
一方、前述の０８８時における耐摩擦摩耗性を確保する
為に従来、記録媒体上に保護膜を形成したり、あるいは
種々の固体、あるいは液体の潤滑剤を記録媒体上に塗布
していた。しかし十分とは言えず時として記録媒体とヘ
ッドとが接触クララシーし、配置装置としてのａｌ能が
損われることがあった・しかも薄膜ヘッドに対しでは耐
摩擦摩耗性を確保する為の積極的な方策が例らとられて
いないのが実情であった〇
本発明は以上の点に−み、薄膜磁気ヘッドの実装ｋかか
わる機械的ｌｌｌ＃ｌ１３題、特に耐摩擦摩耗性を解決
し、信頼性の高い薄膜磁気ヘッドを提供することを目的
とするものである。On the other hand, in order to ensure the above-mentioned friction and wear resistance at 088, conventionally a protective film has been formed on the recording medium or various solid or liquid lubricants have been applied onto the recording medium. However, this was not enough, and the recording medium and head sometimes came into contact with each other, damaging the Al performance as a placement device.Moreover, for thin-film heads, aggressive efforts were made to ensure friction and wear resistance. In view of the above points, the present invention solves the mechanical problems related to the mounting of thin-film magnetic heads, especially friction and wear resistance, and improves reliability. The purpose of this invention is to provide a thin film magnetic head with high performance.
本発明によればスライダー、薄膜トランスデ島−デー、
および保護膜より成るｍｍａ気ヘッドにおいて保＊ｍの
少なくとも一部が潤滑作用を有する物質から成ることを
ｌｌ！Ｉ徴とする薄農轟気ヘッドが得られる。According to the invention, a slider, a thin film transducer,
In the mm air head consisting of a protective film and a protective film, at least a portion of the protective film is composed of a substance that has a lubricating effect! A light agricultural head with the I characteristic is obtained.
以下、本発明の実施例について第２図を参照しながら説
−する。Hereinafter, embodiments of the present invention will be described with reference to FIG.
第２図において、スライダー１のトレーリングエツジ部
に薄膜トランスデー−デーおが絶縁１１２５を介して影
威され、その後絶縁層託が前記薄膜トランスデー−デー
お上に成膜され、更にＭｏｏｓｍＷ８ ｍ ｅ Ｃ＠
Ｂ Ｎなどの潤滑作用を有する物質から成る厚膜あが成
ａされており、前記絶縁層２６および潤滑作用を有する
物質から成る厚１１２４０積鳩体が薄膜トランスデユー
サ−２３に対する保ｓｌＩとなっている・
仁の様な構造を有する＊ｓｉへ豐ドｋｍいては、前述の
通り薄膜磁気ヘッド４１にスライダーの空気流出端部の
保―膜が潤滑作用を有する膜で成膜されている為、記録
媒体との０８８時における耐摩擦摩耗性が改善されるこ
ととなる０しかも記録媒体上にｌｌｋ布された固体ある
いは液体の潤滑剤との相乗効果が期待て會る為、大幅な
耐摩擦摩耗性の改善が達成されることとなる。In FIG. 2, a thin film transducer is applied to the trailing edge of the slider 1 through an insulating film 1125, and then an insulating layer is deposited on the thin film transducer, and a MoosmW8 m e C@
A thick film made of a lubricating substance such as BN is formed, and the insulating layer 26 and the 11,240 mm thick stack made of a lubricating substance serve as insulation for the thin film transducer 23. As mentioned above, the thin-film magnetic head 41 has a retaining film at the air outflow end of the slider that is formed with a film that has a lubricating effect. , the friction and wear resistance at 088 with the recording medium will be improved.Moreover, a synergistic effect with the solid or liquid lubricant spread on the recording medium is expected, so the friction resistance is significantly improved. Improvement in abrasion properties will be achieved.
以上述べてきた様に本発明によれば、記録媒体との０８
８時の耐摩擦摩耗性の改善化より機械的特性が優れ、又
腐食による軟磁性体の劣化を抑制した信麺性の極めて高
い薄膜ヘッドか提供されることとなりその１巣的な意義
は極めて大きいと考えられる◎
尚、以上のＷＩ＆＠においては、保護膜を構成する絶縁
層２と潤滑作用を有する物質より威る厚ｌ［２４とは別
種の物質であることを念頭において説明したか、前記潤
滑作用を有する物質より成る厚膜スか、保１ＩＩＫとし
て必畳な条件、例えば機械的強度勢を満せば保護膜全体
を前記潤滑作用を有する物質より成る厚膜腕より構成し
ても本発明の意とするところは例ら損なわれないことは
轟然である◎更にこの場合、絶縁層５も前記、ＩＲｆ＃
作用を有する物質より成る厚ａ２４と絢−の物質によっ
て構成しても良いことは当然である。As described above, according to the present invention, the 08
8. Improved friction and wear resistance provides a highly reliable thin-film head that has excellent mechanical properties and suppresses deterioration of the soft magnetic material due to corrosion, so its single-minded significance is extremely high. ◎ In the above WI&@, the thickness l[24, which is more powerful than the insulating layer 2 constituting the protective film and the lubricating substance, is considered to be a different type of material. The protective film may be made of a thick film made of a substance having a lubricating effect, or the entire protective film may be composed of a thick film arm made of a substance having a lubricating effect, provided that the necessary conditions for protection 1IIK, such as mechanical strength, are satisfied. It is obvious that the purpose of the present invention is not impaired. Furthermore, in this case, the insulating layer 5 also has the above-mentioned IRf#
It goes without saying that it may be constructed of a thick and thin material made of a material that has an action.
ＪＩ１１図は従来のＮ良磁気ヘッドの概略榊威図、１ｋ
２Ｆｊｌ；Ｊは本発明による薄膜磁気ヘッドの概略構成
図である。
１１ 、２１・・・用スライダー、１２．２２・・・・
・・浮揚面、１５．２５．２６・・・・・・絶縁層、１
３．２３・・・・・・簿膜トランスデューサー、１４・
・・用保［ｊＩ％ ２４・・・・・・潤滑作用を壱する
物質より成る厚膜。JI11 diagram is a schematic diagram of Takeshi Sakaki of a conventional N-type magnetic head, 1k
2Fjl;J is a schematic configuration diagram of a thin film magnetic head according to the present invention. Slider for 11, 21..., 12.22...
...Floating surface, 15.25.26...Insulating layer, 1
3.23... Membrane transducer, 14.
...Usage and maintenance [jI% 24...Thick film made of a substance that has a lubricating effect.
Claims (1)
び保譲膜より成る薄ａｍ気ヘッドにおいて、保−腹の少
なくとも一部が潤滑作用を有する物質から成ることを特
徴とする薄Ｈａ気ヘッド。 （２１Ｎ滑作用を有する物質かＭｏ８ｍ＊ Ｃ，Ｗ８１
＃ＢＮのいづれかであることを特徴とする特許請求の範
鞠第−項記載の嚢膜磁気ヘッド。[Claims] A thin Ha gas head comprising a txt slider, a thin film transducer, and a retention film, characterized in that at least a part of the retention film is made of a substance having a lubricating action. head. (Substance with 21N slipping action or Mo8m* C, W81
A capsular magnetic head according to claim 1, characterized in that it is one of #BN.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3205782A JPS58150123A (en) | 1982-03-01 | 1982-03-01 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3205782A JPS58150123A (en) | 1982-03-01 | 1982-03-01 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58150123A true JPS58150123A (en) | 1983-09-06 |
Family
ID=12348241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3205782A Pending JPS58150123A (en) | 1982-03-01 | 1982-03-01 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58150123A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0644535A2 (en) * | 1993-09-20 | 1995-03-22 | Read-Rite Corporation | Air bearing thin film magnetic head with a wear-resistant end cap |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5042832A (en) * | 1973-08-20 | 1975-04-18 | ||
| JPS52127219A (en) * | 1976-04-16 | 1977-10-25 | Matsushita Electric Ind Co Ltd | Magnetic head |
| JPS56156916A (en) * | 1980-05-07 | 1981-12-03 | Matsushita Electric Ind Co Ltd | Thin-film magnetic head |
-
1982
- 1982-03-01 JP JP3205782A patent/JPS58150123A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5042832A (en) * | 1973-08-20 | 1975-04-18 | ||
| JPS52127219A (en) * | 1976-04-16 | 1977-10-25 | Matsushita Electric Ind Co Ltd | Magnetic head |
| JPS56156916A (en) * | 1980-05-07 | 1981-12-03 | Matsushita Electric Ind Co Ltd | Thin-film magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0644535A2 (en) * | 1993-09-20 | 1995-03-22 | Read-Rite Corporation | Air bearing thin film magnetic head with a wear-resistant end cap |
| EP0644535A3 (en) * | 1993-09-20 | 1996-03-06 | Read Rite Corp | Air bearing thin film magnetic head with a wear-resistant end cap. |
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