JPS63296881A - 金属等加工物の洗浄方法 - Google Patents

金属等加工物の洗浄方法

Info

Publication number
JPS63296881A
JPS63296881A JP13127087A JP13127087A JPS63296881A JP S63296881 A JPS63296881 A JP S63296881A JP 13127087 A JP13127087 A JP 13127087A JP 13127087 A JP13127087 A JP 13127087A JP S63296881 A JPS63296881 A JP S63296881A
Authority
JP
Japan
Prior art keywords
cleaning
tank
workpiece
cleaning tank
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13127087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0349633B2 (enrdf_load_stackoverflow
Inventor
博 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YAMAZAKI KAGAKU KOGYO KK
Original Assignee
YAMAZAKI KAGAKU KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YAMAZAKI KAGAKU KOGYO KK filed Critical YAMAZAKI KAGAKU KOGYO KK
Priority to JP13127087A priority Critical patent/JPS63296881A/ja
Publication of JPS63296881A publication Critical patent/JPS63296881A/ja
Publication of JPH0349633B2 publication Critical patent/JPH0349633B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP13127087A 1987-05-29 1987-05-29 金属等加工物の洗浄方法 Granted JPS63296881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13127087A JPS63296881A (ja) 1987-05-29 1987-05-29 金属等加工物の洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13127087A JPS63296881A (ja) 1987-05-29 1987-05-29 金属等加工物の洗浄方法

Publications (2)

Publication Number Publication Date
JPS63296881A true JPS63296881A (ja) 1988-12-02
JPH0349633B2 JPH0349633B2 (enrdf_load_stackoverflow) 1991-07-30

Family

ID=15054002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13127087A Granted JPS63296881A (ja) 1987-05-29 1987-05-29 金属等加工物の洗浄方法

Country Status (1)

Country Link
JP (1) JPS63296881A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0398683A (ja) * 1989-09-11 1991-04-24 Yamazaki Kagaku Kogyo Kk 加工物の真空洗浄方法及び装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113965A (en) * 1978-02-27 1979-09-05 Paakaa Netsushiyori Kougiyou K Solvent washing method and its device
JPS56115676A (en) * 1980-02-15 1981-09-10 Paakaa Netsushiyori Kogyo Kk Solvent washing method and its device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113965A (en) * 1978-02-27 1979-09-05 Paakaa Netsushiyori Kougiyou K Solvent washing method and its device
JPS56115676A (en) * 1980-02-15 1981-09-10 Paakaa Netsushiyori Kogyo Kk Solvent washing method and its device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0398683A (ja) * 1989-09-11 1991-04-24 Yamazaki Kagaku Kogyo Kk 加工物の真空洗浄方法及び装置

Also Published As

Publication number Publication date
JPH0349633B2 (enrdf_load_stackoverflow) 1991-07-30

Similar Documents

Publication Publication Date Title
US5143103A (en) Apparatus for cleaning and drying workpieces
US6004403A (en) Solvent cleaning system
JPH05255876A (ja) 金属品洗浄方法、金属品洗浄装置及び金属品乾燥装置
US6783602B2 (en) Multistep single chamber parts processing method
JPS63296881A (ja) 金属等加工物の洗浄方法
JP3393519B2 (ja) 金属加工物の洗浄方法及びその装置
JP3584126B2 (ja) 洗浄装置及び洗浄方法
JPH0146162B2 (enrdf_load_stackoverflow)
JP2977922B2 (ja) 圧力スイング洗浄方法および装置
JP2784159B2 (ja) 被洗浄物の洗浄方法及びその装置
JP3052103B2 (ja) 真空脱脂洗浄装置
JP3328460B2 (ja) 真空脱脂洗浄方法
JP3273339B2 (ja) 脱脂洗浄方法および装置
JP6351195B1 (ja) 被洗浄物の洗浄装置
JPH08318233A (ja) 減圧洗浄乾燥装置
JP3182136B2 (ja) 洗浄装置
JP3184672B2 (ja) 金属品洗浄方法及び金属品洗浄装置
JPS60174889A (ja) 洗浄装置
JP2001033168A (ja) 表面処理方法、並びにそれに用いる装置
JP4290318B2 (ja) 多段洗浄方法及び装置
JPS58210888A (ja) 電気機器の洗浄乾燥方法
JPH07166385A (ja) 真空脱脂洗浄設備
JPS63249146A (ja) マスク洗浄装置
JP2965386B2 (ja) 金属被洗浄物の洗浄方法及び洗浄装置
JP3285683B2 (ja) ディスク基板の洗浄装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term