JPS6329419B2 - - Google Patents
Info
- Publication number
- JPS6329419B2 JPS6329419B2 JP53091336A JP9133678A JPS6329419B2 JP S6329419 B2 JPS6329419 B2 JP S6329419B2 JP 53091336 A JP53091336 A JP 53091336A JP 9133678 A JP9133678 A JP 9133678A JP S6329419 B2 JPS6329419 B2 JP S6329419B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- gate
- drain
- conductivity type
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012535 impurity Substances 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 11
- 238000005036 potential barrier Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007667 floating Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000001747 exhibiting effect Effects 0.000 claims 2
- 230000000630 rising effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 7
- 230000005669 field effect Effects 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 5
- 239000000969 carrier Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
- Logic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9133678A JPS5452479A (en) | 1978-07-25 | 1978-07-25 | Semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9133678A JPS5452479A (en) | 1978-07-25 | 1978-07-25 | Semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5452479A JPS5452479A (en) | 1979-04-25 |
| JPS6329419B2 true JPS6329419B2 (US07922777-20110412-C00004.png) | 1988-06-14 |
Family
ID=14023583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9133678A Granted JPS5452479A (en) | 1978-07-25 | 1978-07-25 | Semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5452479A (US07922777-20110412-C00004.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55166956A (en) * | 1979-06-15 | 1980-12-26 | Semiconductor Res Found | Semiconductor device |
| JPS5674962A (en) * | 1979-11-21 | 1981-06-20 | Semiconductor Res Found | Semiconductor device |
-
1978
- 1978-07-25 JP JP9133678A patent/JPS5452479A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5452479A (en) | 1979-04-25 |
