JPS6328857Y2 - - Google Patents

Info

Publication number
JPS6328857Y2
JPS6328857Y2 JP1981091840U JP9184081U JPS6328857Y2 JP S6328857 Y2 JPS6328857 Y2 JP S6328857Y2 JP 1981091840 U JP1981091840 U JP 1981091840U JP 9184081 U JP9184081 U JP 9184081U JP S6328857 Y2 JPS6328857 Y2 JP S6328857Y2
Authority
JP
Japan
Prior art keywords
emitter
voltage
signal
filament
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981091840U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57203453U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981091840U priority Critical patent/JPS6328857Y2/ja
Publication of JPS57203453U publication Critical patent/JPS57203453U/ja
Application granted granted Critical
Publication of JPS6328857Y2 publication Critical patent/JPS6328857Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1981091840U 1981-06-22 1981-06-22 Expired JPS6328857Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981091840U JPS6328857Y2 (enrdf_load_html_response) 1981-06-22 1981-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981091840U JPS6328857Y2 (enrdf_load_html_response) 1981-06-22 1981-06-22

Publications (2)

Publication Number Publication Date
JPS57203453U JPS57203453U (enrdf_load_html_response) 1982-12-24
JPS6328857Y2 true JPS6328857Y2 (enrdf_load_html_response) 1988-08-03

Family

ID=29886909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981091840U Expired JPS6328857Y2 (enrdf_load_html_response) 1981-06-22 1981-06-22

Country Status (1)

Country Link
JP (1) JPS6328857Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019016857A1 (ja) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246756A (en) * 1975-10-11 1977-04-13 Hitachi Ltd Field-emission type electron gun

Also Published As

Publication number Publication date
JPS57203453U (enrdf_load_html_response) 1982-12-24

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