JPS6328857Y2 - - Google Patents
Info
- Publication number
- JPS6328857Y2 JPS6328857Y2 JP1981091840U JP9184081U JPS6328857Y2 JP S6328857 Y2 JPS6328857 Y2 JP S6328857Y2 JP 1981091840 U JP1981091840 U JP 1981091840U JP 9184081 U JP9184081 U JP 9184081U JP S6328857 Y2 JPS6328857 Y2 JP S6328857Y2
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- voltage
- signal
- filament
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 6
- 230000006378 damage Effects 0.000 description 4
- 238000009499 grossing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
【考案の詳細な説明】
本考案はエミツタの破壊を防止した電界放射型
電子銃のフラツシユ装置に関する。[Detailed Description of the Invention] The present invention relates to a flash device for a field emission type electron gun that prevents destruction of the emitter.
周知の如く電界放射型電子銃では、エミツタの
先端部に強電界を発生させてエミツタから電子を
放出させ、更にエミツタに負の加速電圧を印加し
て該放射電子を加速するようにしている。さて、
一般的に斯くの如き電子銃を数時間使用すると、
エミツタの表面にガスが吸着したり、該表面がイ
オン衝撃を受けて例えばぎざぎざ状態になつてし
まう。すると局部的に可成強い電界がかかり、異
常電流が流れて破壊してしまう。そこで、斯くの
如き破壊が起きない様に、一般に数時間毎に、或
はエミツシヨン電流が不安定になつた時又はエミ
ツタの先端部に強電界を発生させる為の電極に印
加される直流電圧が過大になつた時に、自動的に
エミツタに交流電流（フラツシユ電流）を流して
該エミツタを加熱し、該エミツタの表面をスムー
ズイングするようになしている。尚、このスムー
ズイングを行なう装置をフラツシユ装置と称して
いる。 As is well known, in a field emission type electron gun, a strong electric field is generated at the tip of the emitter to emit electrons from the emitter, and a negative accelerating voltage is applied to the emitter to accelerate the emitted electrons. Now,
Generally, after using such an electron gun for several hours,
Gas may be adsorbed on the surface of the emitter, or the surface may be subjected to ion bombardment, resulting in a jagged state, for example. This creates a locally strong electric field, causing an abnormal current to flow and destroy the device. Therefore, in order to prevent such destruction from occurring, the DC voltage applied to the electrode to generate a strong electric field at the tip of the emitter is generally adjusted every few hours, or when the emitter current becomes unstable, or when the emitter current becomes unstable. When the temperature becomes excessive, an alternating current (flash current) is automatically passed through the emitter to heat the emitter and smooth the surface of the emitter. Note that the device that performs this smoothing is called a flushing device.
所で、エミツタを保持し加熱する為のフイラメ
ントの抵抗が著しく小さいので、フラツシユ電流
の通り路に些細な接触不良が生じても、フイラメ
ントにフラツシユ電流が僅かしか流れなかつた
り、全く流れないことがあり、フイラメントおよ
びエミツタが充分に加熱されず、スムーズイング
処理が行われず、結果的に、エミツタ表面はぎざ
ぎざのままとなつて局部的にかなり強い電界がか
かり、該エミツタの破壊が生じていた。 By the way, the resistance of the filament that holds and heats the emitter is extremely small, so even if a slight contact failure occurs in the path of the flashing current, only a small amount of flashing current or no flashing current will flow through the filament. However, the filament and emitter were not heated sufficiently and the smoothing process was not performed, and as a result, the surface of the emitter remained jagged and a fairly strong electric field was applied locally, causing destruction of the emitter.
本考案は斯くの如き点に鑑みてなされたもの
で、電界放射型電子銃のエミツタを支持するフイ
ラメントに電流を供給して加熱し、該エミツタを
加熱するようになした装置において、該エミツタ
と引出し電極との間に電圧を印加する第１の電源
と、該エミツタと加速電極との間に電圧を印加す
る第２の電源と、該第１の電源から該エミツタと
引出し電極間への電圧の印加を停止する第１のス
イツチ手段し、該第２の電源から該エミツタと加
速電極の間への電圧の印加を停止する第２のスイ
ツチ手段と、前記フイラメントに流れる電流を検
出する手段と、該検出信号と基準信号とを比較す
る比較器と、該検出信号値が基準値以下の時、該
比較器からの信号に基づき該第１と第２のスイツ
チ手段をオフにする制御手段とを備えたことを特
徴とする電界放射型電子銃のフラツシユ装置を提
供するものである。 The present invention has been made in view of the above points, and is a device that heats the emitter by supplying current to a filament that supports the emitter of a field emission type electron gun. A first power source that applies a voltage between the emitter and the accelerating electrode, a second power source that applies a voltage between the emitter and the accelerating electrode, and a voltage from the first power source between the emitter and the extractor electrode. a first switch means for stopping the application of a voltage from the second power supply between the emitter and the accelerating electrode; and a means for detecting the current flowing through the filament. , a comparator for comparing the detection signal with a reference signal, and control means for turning off the first and second switch means based on a signal from the comparator when the detection signal value is less than the reference value. The present invention provides a flashing device for a field emission type electron gun, which is characterized in that it is equipped with the following.
添付図は本考案の一実施例を示した電界放射型
電子銃のフラツシユ装置の概略図を示したもので
ある。図中１は真空に保たれた電子銃室部、２は
エミツタ、３は該エミツタを保持し加熱する為の
フイラメント、４は該エミツタの先端部に強電界
を発生させる為の引出し電極、５は該エミツタか
ら放出される電子を加速する為の陽極で大地に接
続されている。６は前記引出し電極４とエミツタ
２間に印加される正の直流電圧を発する電圧源
で、アンプA1及びスイツチS1を介して送られて
来るボリユーム７による信号に応じた電圧を発す
る。８は前記陽極５とエミツタ２間に印加される
正の直流電圧を発する電圧源で、アンプA2及び
スイツチS2を介して送られて来るボリユーム９に
よる信号に応じた電圧を発する。１０はフラツシ
ユ電圧源で、スイツチS3をオンの状態にすること
により、該電圧源からの交流電力が絶縁トランス
１１を介して前記フイラメント３へ印加される。
１２は前記フイラメント３へ流れるフラツシユ電
流に対応した電流を検出するフラツシユ電流検出
コアで、該検出コアに検出されたフラツシユ電流
に対応した信号は整流器１３によつて直流電圧信
号に変換され、比較器１４の負の入力端子に送ら
れる。該比較器の正の入力端子には予め知られて
いる適正なフラツシユ電流値に対応した基準電圧
値が入力されている。該比較器は負の入力端子に
入力された信号が基準値より小さい時だけ“１”
の信号を出力し、それ以外の時は信号を出力しな
い（即ち“０”の信号を出力する。）。１５はアン
ド回路で、前記スイツチS3をオンの状態にするパ
ルス信号を発するフラツシユスタート信号発生器
１９からのパルス信号と前記比較器１４の出力が
供給される。１６はトランジスタで、前記アンド
回路１５の出力によつてコントロールされる。１
７，１８は夫々該トランジスタ１６に電流が流れ
た時、点燈する警報ランプ、前記スイツチS1及び
S2をオフの状態にする自己保持型リレー回路であ
る。該リレー回路はリセツトボタン２０を押す
と、リレーが働かなくなる。 The attached drawing shows a schematic diagram of a flashing device for a field emission type electron gun showing an embodiment of the present invention. In the figure, 1 is an electron gun chamber kept in a vacuum, 2 is an emitter, 3 is a filament for holding and heating the emitter, 4 is an extraction electrode for generating a strong electric field at the tip of the emitter, 5 is connected to the ground with an anode for accelerating the electrons emitted from the emitter. A voltage source 6 generates a positive DC voltage applied between the extraction electrode 4 and the emitter 2, and generates a voltage according to a signal from the volume 7 sent via the amplifier A1 and the switch S1 . Reference numeral 8 denotes a voltage source that generates a positive DC voltage applied between the anode 5 and the emitter 2, and generates a voltage according to a signal from a volume 9 sent via an amplifier A 2 and a switch S 2 . Reference numeral 10 denotes a flash voltage source, and by turning on a switch S 3 , AC power from the voltage source is applied to the filament 3 via an isolation transformer 11 .
Reference numeral 12 denotes a flash current detection core that detects a current corresponding to the flash current flowing to the filament 3. A signal corresponding to the flash current detected by the detection core is converted into a DC voltage signal by a rectifier 13, and a signal is converted to a DC voltage signal by a comparator. 14 negative input terminal. A reference voltage value corresponding to an appropriate flash current value known in advance is input to the positive input terminal of the comparator. The comparator becomes “1” only when the signal input to the negative input terminal is smaller than the reference value.
It outputs a signal of "0" and does not output a signal at other times (that is, outputs a signal of "0"). 15 is an AND circuit to which a pulse signal from a flash start signal generator 19 which generates a pulse signal for turning on the switch S3 and the output of the comparator 14 are supplied. 16 is a transistor, which is controlled by the output of the AND circuit 15; 1
7 and 18 are alarm lamps that light up when current flows through the transistor 16, and the switches S1 and
This is a self-holding relay circuit that turns S2 off. When the reset button 20 of the relay circuit is pressed, the relay stops working.
斯くの如き装置において、通常、スイツチS1，
S2はオンの状態にあり、アンド回路１５の一方の
入力端子にはフラツシユスタート信号発生器１９
からパルスが供給されていないので、該アンド回
路は出力を発しなく、従つて、トランジスタ１６
には電流が流れないので、リレー１８も警報ラン
プ１７も作動しない。さて、フラツシユ時、フラ
ツシユスタート信号発生器１９からスイツチS3と
アンド回路１５にパルス信号が送られるので、フ
ラツシユ電源１０からフイラメント３へフラツシ
ユ電流が流される。この時、該フラツシユ電流値
が基準値より小さい時、比較器１４は“１”の信
号をアンド回路１５に送るので、該アンド回路は
出力を発し、トランジスタ１６に電流が流れる。
従つて、警報ランプ１７は点燈し、リレー作動に
より前記スイツチS1，S2がオフの状態になり、引
出し電極４及び陽極５に印加されている電圧が切
られてしまう。よつて、フイラメント３に流れる
フラツシユ電流が不足で、スムーズイング処理が
行えず、エミツタ表面がぎざぎざのままであつて
も、エミツタへの電圧の印加が停止される。従つ
て、該エミツタ表面に局部的な電界の集中は生じ
ることがないので、該エミツタの破壊が防止され
る。又、警報ランプの点燈により、フラツシユ電
流の不足及びフラツシユ回路系の異常を即座に知
ることが出来る。 In such devices, the switches S 1 ,
S2 is in the on state, and one input terminal of the AND circuit 15 is connected to the flash start signal generator 19.
Since no pulses are being supplied from the
Since no current flows through the terminal, neither the relay 18 nor the alarm lamp 17 operates. Now, at the time of flashing, a pulse signal is sent from the flash start signal generator 19 to the switch S3 and the AND circuit 15, so that a flash current is caused to flow from the flash power supply 10 to the filament 3. At this time, when the flash current value is smaller than the reference value, the comparator 14 sends a signal of "1" to the AND circuit 15, so the AND circuit issues an output and current flows through the transistor 16.
Therefore, the alarm lamp 17 lights up, the switches S 1 and S 2 are turned off by the relay operation, and the voltage applied to the extraction electrode 4 and the anode 5 is cut off. Therefore, even if the flashing current flowing through the filament 3 is insufficient and the smoothing process cannot be performed and the emitter surface remains jagged, the application of voltage to the emitter is stopped. Therefore, local electric field concentration does not occur on the surface of the emitter, so destruction of the emitter is prevented. Furthermore, by lighting the alarm lamp, it is possible to immediately know if there is a shortage of flash current or if there is an abnormality in the flash circuit system.
添付図面は本考案の一実施例を示した電界放射
型電子銃のフラツシユ装置の概略図である。
１……電子銃室部、２……エミツタ、４……引
出し電極、５……陽極、６……電圧源、８……電
圧源、S1，S2……スイツチ、１０……フラツシユ
電源、１２……フラツシユ電流検出コア、１４…
…比較器、１９……フラツシユスタート信号発生
器、１６……トランジスタ、１７……警報ラン
プ、１８……自己保持型リレー回路、１５……ア
ンド回路。
The accompanying drawing is a schematic diagram of a flash device for a field emission type electron gun showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Electron gun chamber, 2...Emitter, 4...Extraction electrode, 5...Anode, 6...Voltage source, 8...Voltage source, S1 , S2 ...Switch, 10...Flash power supply , 12...Flash current detection core, 14...
... Comparator, 19 ... Flash start signal generator, 16 ... Transistor, 17 ... Alarm lamp, 18 ... Self-holding relay circuit, 15 ... AND circuit.
Claims (1)
メントに電流を供給して加熱し、該エミツタを加
熱するようになした装置において、該エミツタと
引出し電極との間に電圧を印加する第１の電源
と、該エミツタと加速電極との間に電圧を印加す
る第２の電源と、該第１の電源から該エミツタと
引出し電極間への電圧の印加を停止する第１のス
イツチ手段と、該第２の電源から該エミツタと加
速電極の間への電圧の印加を停止する第２のスイ
ツチ手段と、前記フイラメントに流れる電流を検
出する手段と、該検出信号と基準信号とを比較す
る比較器と、該検出信号値が基準値以下の時、該
比較器からの信号に基づき該第１と第２のスイツ
チ手段をオフの状態にする制御手段とを備えたこ
とを特徴とする電界放射型電子銃のフラツシユ装
置。 A device for heating the emitter by supplying a current to a filament supporting the emitter of a field emission electron gun, the device comprising: a first power source for applying a voltage between the emitter and an extraction electrode; , a second power supply for applying a voltage between the emitter and the accelerating electrode, a first switch means for stopping the application of voltage from the first power supply between the emitter and the extraction electrode; a second switch means for stopping the application of voltage between the emitter and the accelerating electrode from the power source of the filament, a means for detecting the current flowing through the filament, and a comparator for comparing the detection signal with a reference signal; A field emission type electron gun, comprising: control means for turning off the first and second switch means based on a signal from the comparator when the detected signal value is less than a reference value. flash device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981091840U JPS6328857Y2 (en) | 1981-06-22 | 1981-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981091840U JPS6328857Y2 (en) | 1981-06-22 | 1981-06-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57203453U JPS57203453U (en) | 1982-12-24 |
| JPS6328857Y2 true JPS6328857Y2 (en) | 1988-08-03 |
Family
ID=29886909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981091840U Expired JPS6328857Y2 (en) | 1981-06-22 | 1981-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328857Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019016857A1 (en) * | 2017-07-18 | 2019-01-24 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246756A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Field-emission type electron gun |
-
1981
- 1981-06-22 JP JP1981091840U patent/JPS6328857Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246756A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Field-emission type electron gun |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57203453U (en) | 1982-12-24 |
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