JPS57203453U - - Google Patents

Info

Publication number
JPS57203453U
JPS57203453U JP9184081U JP9184081U JPS57203453U JP S57203453 U JPS57203453 U JP S57203453U JP 9184081 U JP9184081 U JP 9184081U JP 9184081 U JP9184081 U JP 9184081U JP S57203453 U JPS57203453 U JP S57203453U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9184081U
Other languages
Japanese (ja)
Other versions
JPS6328857Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981091840U priority Critical patent/JPS6328857Y2/ja
Publication of JPS57203453U publication Critical patent/JPS57203453U/ja
Application granted granted Critical
Publication of JPS6328857Y2 publication Critical patent/JPS6328857Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1981091840U 1981-06-22 1981-06-22 Expired JPS6328857Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981091840U JPS6328857Y2 (enrdf_load_html_response) 1981-06-22 1981-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981091840U JPS6328857Y2 (enrdf_load_html_response) 1981-06-22 1981-06-22

Publications (2)

Publication Number Publication Date
JPS57203453U true JPS57203453U (enrdf_load_html_response) 1982-12-24
JPS6328857Y2 JPS6328857Y2 (enrdf_load_html_response) 1988-08-03

Family

ID=29886909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981091840U Expired JPS6328857Y2 (enrdf_load_html_response) 1981-06-22 1981-06-22

Country Status (1)

Country Link
JP (1) JPS6328857Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019016857A1 (ja) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246756A (en) * 1975-10-11 1977-04-13 Hitachi Ltd Field-emission type electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246756A (en) * 1975-10-11 1977-04-13 Hitachi Ltd Field-emission type electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019016857A1 (ja) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置
US10973112B2 (en) 2017-07-18 2021-04-06 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS6328857Y2 (enrdf_load_html_response) 1988-08-03

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