JPS6328599Y2 - - Google Patents
Info
- Publication number
- JPS6328599Y2 JPS6328599Y2 JP19366683U JP19366683U JPS6328599Y2 JP S6328599 Y2 JPS6328599 Y2 JP S6328599Y2 JP 19366683 U JP19366683 U JP 19366683U JP 19366683 U JP19366683 U JP 19366683U JP S6328599 Y2 JPS6328599 Y2 JP S6328599Y2
- Authority
- JP
- Japan
- Prior art keywords
- holding jig
- arm
- heat treatment
- transfer arm
- treatment chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19366683U JPS60101747U (ja) | 1983-12-16 | 1983-12-16 | ウエ−ハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19366683U JPS60101747U (ja) | 1983-12-16 | 1983-12-16 | ウエ−ハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60101747U JPS60101747U (ja) | 1985-07-11 |
| JPS6328599Y2 true JPS6328599Y2 (de) | 1988-08-02 |
Family
ID=30416485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19366683U Granted JPS60101747U (ja) | 1983-12-16 | 1983-12-16 | ウエ−ハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60101747U (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2590352B2 (ja) * | 1987-12-18 | 1997-03-12 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
| JP2733681B2 (ja) * | 1988-03-09 | 1998-03-30 | 東京エレクトロン株式会社 | 熱処理装置 |
-
1983
- 1983-12-16 JP JP19366683U patent/JPS60101747U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60101747U (ja) | 1985-07-11 |
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