JPS6328519Y2 - - Google Patents

Info

Publication number
JPS6328519Y2
JPS6328519Y2 JP1982014342U JP1434282U JPS6328519Y2 JP S6328519 Y2 JPS6328519 Y2 JP S6328519Y2 JP 1982014342 U JP1982014342 U JP 1982014342U JP 1434282 U JP1434282 U JP 1434282U JP S6328519 Y2 JPS6328519 Y2 JP S6328519Y2
Authority
JP
Japan
Prior art keywords
hole
sample
spring member
contact surface
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982014342U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58117055U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1434282U priority Critical patent/JPS58117055U/ja
Publication of JPS58117055U publication Critical patent/JPS58117055U/ja
Application granted granted Critical
Publication of JPS6328519Y2 publication Critical patent/JPS6328519Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1434282U 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置 Granted JPS58117055U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1434282U JPS58117055U (ja) 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1434282U JPS58117055U (ja) 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置

Publications (2)

Publication Number Publication Date
JPS58117055U JPS58117055U (ja) 1983-08-10
JPS6328519Y2 true JPS6328519Y2 (pm) 1988-08-01

Family

ID=30026812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1434282U Granted JPS58117055U (ja) 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置

Country Status (1)

Country Link
JP (1) JPS58117055U (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6962721B2 (ja) * 2017-06-23 2021-11-05 日本電子株式会社 試料ホルダーおよび電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083091A (pm) * 1973-11-22 1975-07-04
JPS5752862Y2 (pm) * 1976-10-05 1982-11-16

Also Published As

Publication number Publication date
JPS58117055U (ja) 1983-08-10

Similar Documents

Publication Publication Date Title
JP5208449B2 (ja) 試料キャリア及び試料ホルダ
US6995380B2 (en) End effector for supporting a microsample
US5008537A (en) Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
EP1305816B1 (en) Collection of secondary electrons through the objective lens of a scanning electron microscope
US6600156B2 (en) Scanning electron microscope
EP0293924B1 (en) Direct imaging monochromatic electron microscope
EP1063677A1 (en) Charged particle beam device
JPS6328519Y2 (pm)
US5448064A (en) Scanning electron microscope
JPH05182625A (ja) 対物レンズ
EP0085323B1 (en) Electromagnetic lens polepiece structure
JP2001338599A (ja) 荷電粒子線装置
JP3266814B2 (ja) 微小部分析装置
GB2118361A (en) Scanning electron beam apparatus
JP2001500667A (ja) 高テイクオフ角度のエネルギー分散分光法（ｅｄｓ）検出器用のコリメータ
GB918297A (en) Improvements in electron microscopes
DE2640260B2 (de) Durchstrahlungs-Raster-Korpuskularstrahlmikroskop
JPH0228609Y2 (pm)
JP4146103B2 (ja) 電界放射型電子銃を備えた電子ビーム装置
JPS5968159A (ja) イオン源を用いた分析装置
JP2002150983A (ja) マニピュレータ
JPH05182624A (ja) 対物絞り
JP3064335B2 (ja) 透過型電子顕微鏡
WO1999053517A1 (en) Magnetic immersion lenses
JPH0684492A (ja) 電子顕微鏡