JPH0228609Y2 - - Google Patents
Info
- Publication number
- JPH0228609Y2 JPH0228609Y2 JP15919283U JP15919283U JPH0228609Y2 JP H0228609 Y2 JPH0228609 Y2 JP H0228609Y2 JP 15919283 U JP15919283 U JP 15919283U JP 15919283 U JP15919283 U JP 15919283U JP H0228609 Y2 JPH0228609 Y2 JP H0228609Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- objective lens
- electron
- detector
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919283U JPS6065967U (ja) | 1983-10-14 | 1983-10-14 | 走査電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919283U JPS6065967U (ja) | 1983-10-14 | 1983-10-14 | 走査電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6065967U JPS6065967U (ja) | 1985-05-10 |
| JPH0228609Y2 true JPH0228609Y2 (pm) | 1990-07-31 |
Family
ID=30350501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15919283U Granted JPS6065967U (ja) | 1983-10-14 | 1983-10-14 | 走査電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6065967U (pm) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5403852B2 (ja) | 2005-08-12 | 2014-01-29 | 株式会社荏原製作所 | 検出装置及び検査装置 |
| WO2011055520A1 (ja) * | 2009-11-06 | 2011-05-12 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
| JP6931555B2 (ja) * | 2017-06-02 | 2021-09-08 | 日本電子株式会社 | 走査電子顕微鏡 |
-
1983
- 1983-10-14 JP JP15919283U patent/JPS6065967U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6065967U (ja) | 1985-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3774953B2 (ja) | 走査形電子顕微鏡 | |
| US5362964A (en) | Environmental scanning electron microscope | |
| JP2875940B2 (ja) | 試料の高さ計測手段を備えた電子ビーム装置 | |
| JP2002042713A (ja) | 対物レンズ内検出器を備えた走査電子顕微鏡 | |
| JPH0228609Y2 (pm) | ||
| JP3966350B2 (ja) | 走査形電子顕微鏡 | |
| JP2973136B2 (ja) | 粒子線装置 | |
| JPH08138611A (ja) | 荷電粒子線装置 | |
| JPH0935679A (ja) | 走査電子顕微鏡 | |
| JP3244620B2 (ja) | 走査電子顕微鏡 | |
| US4121100A (en) | Electron microscope | |
| JPH0129021B2 (pm) | ||
| JP3494152B2 (ja) | 走査形電子顕微鏡 | |
| JP4179390B2 (ja) | 走査形電子顕微鏡 | |
| JP3992021B2 (ja) | 走査形電子顕微鏡 | |
| JP4179369B2 (ja) | 走査形電子顕微鏡 | |
| JP4146103B2 (ja) | 電界放射型電子銃を備えた電子ビーム装置 | |
| JPH0236207Y2 (pm) | ||
| JPH0319166Y2 (pm) | ||
| JPS6321886Y2 (pm) | ||
| JPH03295141A (ja) | 検出器 | |
| JPS6342460Y2 (pm) | ||
| JPH057820B2 (pm) | ||
| JP2560271B2 (ja) | 走査形電子顕微鏡 | |
| JPH09190793A (ja) | 走査電子顕微鏡 |