JPS6321886Y2 - - Google Patents

Info

Publication number
JPS6321886Y2
JPS6321886Y2 JP1981094853U JP9485381U JPS6321886Y2 JP S6321886 Y2 JPS6321886 Y2 JP S6321886Y2 JP 1981094853 U JP1981094853 U JP 1981094853U JP 9485381 U JP9485381 U JP 9485381U JP S6321886 Y2 JPS6321886 Y2 JP S6321886Y2
Authority
JP
Japan
Prior art keywords
detector
sample
scanning
electron beam
field image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981094853U
Other languages
English (en)
Japanese (ja)
Other versions
JPS582856U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9485381U priority Critical patent/JPS582856U/ja
Publication of JPS582856U publication Critical patent/JPS582856U/ja
Application granted granted Critical
Publication of JPS6321886Y2 publication Critical patent/JPS6321886Y2/ja
Granted legal-status Critical Current

Links

JP9485381U 1981-06-26 1981-06-26 透過走査像観察装置 Granted JPS582856U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9485381U JPS582856U (ja) 1981-06-26 1981-06-26 透過走査像観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9485381U JPS582856U (ja) 1981-06-26 1981-06-26 透過走査像観察装置

Publications (2)

Publication Number Publication Date
JPS582856U JPS582856U (ja) 1983-01-10
JPS6321886Y2 true JPS6321886Y2 (pm) 1988-06-16

Family

ID=29889774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9485381U Granted JPS582856U (ja) 1981-06-26 1981-06-26 透過走査像観察装置

Country Status (1)

Country Link
JP (1) JPS582856U (pm)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327683U (pm) * 1986-08-05 1988-02-23
JP6118898B2 (ja) * 2013-05-30 2017-04-19 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法
JP6191636B2 (ja) * 2014-03-03 2017-09-06 Ｊｆｅスチール株式会社 電子線を用いた試料観察方法、および、電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824900B2 (ja) * 1978-02-27 1983-05-24 日本電子株式会社 電子顕微鏡
JPS5938701B2 (ja) * 1979-04-10 1984-09-18 株式会社国際精工 二段試料台を備えた走査型電子顕微鏡

Also Published As

Publication number Publication date
JPS582856U (ja) 1983-01-10

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