JPS6327848B2 - - Google Patents

Info

Publication number
JPS6327848B2
JPS6327848B2 JP16402578A JP16402578A JPS6327848B2 JP S6327848 B2 JPS6327848 B2 JP S6327848B2 JP 16402578 A JP16402578 A JP 16402578A JP 16402578 A JP16402578 A JP 16402578A JP S6327848 B2 JPS6327848 B2 JP S6327848B2
Authority
JP
Japan
Prior art keywords
silicon dioxide
dioxide layer
gas
material layer
polymer material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16402578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5587436A (en
Inventor
Moritaka Nakamura
Kazuo Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16402578A priority Critical patent/JPS5587436A/ja
Publication of JPS5587436A publication Critical patent/JPS5587436A/ja
Publication of JPS6327848B2 publication Critical patent/JPS6327848B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP16402578A 1978-12-25 1978-12-25 Method of producing semiconductor device Granted JPS5587436A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16402578A JPS5587436A (en) 1978-12-25 1978-12-25 Method of producing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16402578A JPS5587436A (en) 1978-12-25 1978-12-25 Method of producing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5587436A JPS5587436A (en) 1980-07-02
JPS6327848B2 true JPS6327848B2 (OSRAM) 1988-06-06

Family

ID=15785356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16402578A Granted JPS5587436A (en) 1978-12-25 1978-12-25 Method of producing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5587436A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236329A (ja) * 1988-07-27 1990-02-06 Showa Electric Wire & Cable Co Ltd ケーブルのプーリングアイ防水試験方法
JPH0669796U (ja) * 1993-03-10 1994-09-30 東京部品工業株式会社 外部観察形洩れ検出器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120092314A (zh) * 2022-11-02 2025-06-03 Ａｇｃ株式会社 制造具有凹部结构的部件的方法和具有凹部结构的部件
WO2024247461A1 (ja) * 2023-05-31 2024-12-05 Ａｇｃ株式会社 凹部構造を有する部材を製造する方法および凹部構造を有する部材

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236329A (ja) * 1988-07-27 1990-02-06 Showa Electric Wire & Cable Co Ltd ケーブルのプーリングアイ防水試験方法
JPH0669796U (ja) * 1993-03-10 1994-09-30 東京部品工業株式会社 外部観察形洩れ検出器

Also Published As

Publication number Publication date
JPS5587436A (en) 1980-07-02

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