JPS63265698A - レールタイプ自在平行定規装置 - Google Patents
レールタイプ自在平行定規装置Info
- Publication number
- JPS63265698A JPS63265698A JP2846288A JP2846288A JPS63265698A JP S63265698 A JPS63265698 A JP S63265698A JP 2846288 A JP2846288 A JP 2846288A JP 2846288 A JP2846288 A JP 2846288A JP S63265698 A JPS63265698 A JP S63265698A
- Authority
- JP
- Japan
- Prior art keywords
- scale
- circuit
- position data
- head
- coordinate axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011295 pitch Substances 0.000 description 48
- 238000001514 detection method Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2846288A JPS63265698A (ja) | 1988-02-09 | 1988-02-09 | レールタイプ自在平行定規装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2846288A JPS63265698A (ja) | 1988-02-09 | 1988-02-09 | レールタイプ自在平行定規装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63265698A true JPS63265698A (ja) | 1988-11-02 |
JPH0476796B2 JPH0476796B2 (enrdf_load_stackoverflow) | 1992-12-04 |
Family
ID=12249327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2846288A Granted JPS63265698A (ja) | 1988-02-09 | 1988-02-09 | レールタイプ自在平行定規装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63265698A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0314412U (enrdf_load_stackoverflow) * | 1989-06-27 | 1991-02-14 |
-
1988
- 1988-02-09 JP JP2846288A patent/JPS63265698A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0314412U (enrdf_load_stackoverflow) * | 1989-06-27 | 1991-02-14 |
Also Published As
Publication number | Publication date |
---|---|
JPH0476796B2 (enrdf_load_stackoverflow) | 1992-12-04 |
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