JPS6324638A - 微細ホ−ルうめこみ方法 - Google Patents

微細ホ−ルうめこみ方法

Info

Publication number
JPS6324638A
JPS6324638A JP61166652A JP16665286A JPS6324638A JP S6324638 A JPS6324638 A JP S6324638A JP 61166652 A JP61166652 A JP 61166652A JP 16665286 A JP16665286 A JP 16665286A JP S6324638 A JPS6324638 A JP S6324638A
Authority
JP
Japan
Prior art keywords
film
deposited
contact hole
hole
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61166652A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0569294B2 (enExample
Inventor
Toru Mogami
徹 最上
Hidekazu Okabayashi
岡林　秀和
Eiji Nagasawa
長澤　英二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61166652A priority Critical patent/JPS6324638A/ja
Publication of JPS6324638A publication Critical patent/JPS6324638A/ja
Publication of JPH0569294B2 publication Critical patent/JPH0569294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP61166652A 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法 Granted JPS6324638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61166652A JPS6324638A (ja) 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61166652A JPS6324638A (ja) 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法

Publications (2)

Publication Number Publication Date
JPS6324638A true JPS6324638A (ja) 1988-02-02
JPH0569294B2 JPH0569294B2 (enExample) 1993-09-30

Family

ID=15835234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61166652A Granted JPS6324638A (ja) 1986-07-17 1986-07-17 微細ホ−ルうめこみ方法

Country Status (1)

Country Link
JP (1) JPS6324638A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60233840A (ja) * 1984-05-04 1985-11-20 Nec Corp 段差の被覆方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60233840A (ja) * 1984-05-04 1985-11-20 Nec Corp 段差の被覆方法

Also Published As

Publication number Publication date
JPH0569294B2 (enExample) 1993-09-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term