JPS6323876Y2 - - Google Patents

Info

Publication number
JPS6323876Y2
JPS6323876Y2 JP1982008585U JP858582U JPS6323876Y2 JP S6323876 Y2 JPS6323876 Y2 JP S6323876Y2 JP 1982008585 U JP1982008585 U JP 1982008585U JP 858582 U JP858582 U JP 858582U JP S6323876 Y2 JPS6323876 Y2 JP S6323876Y2
Authority
JP
Japan
Prior art keywords
insulator
ion
ion gun
wall
gun chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982008585U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58110949U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP858582U priority Critical patent/JPS58110949U/ja
Publication of JPS58110949U publication Critical patent/JPS58110949U/ja
Application granted granted Critical
Publication of JPS6323876Y2 publication Critical patent/JPS6323876Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP858582U 1982-01-25 1982-01-25 イオン銃 Granted JPS58110949U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP858582U JPS58110949U (ja) 1982-01-25 1982-01-25 イオン銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP858582U JPS58110949U (ja) 1982-01-25 1982-01-25 イオン銃

Publications (2)

Publication Number Publication Date
JPS58110949U JPS58110949U (ja) 1983-07-28
JPS6323876Y2 true JPS6323876Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-30

Family

ID=30021270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP858582U Granted JPS58110949U (ja) 1982-01-25 1982-01-25 イオン銃

Country Status (1)

Country Link
JP (1) JPS58110949U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526228B2 (ja) * 1987-01-31 1996-08-21 東京エレクトロン株式会社 電子ビ―ム式プラズマ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439974U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-08-24 1979-03-16

Also Published As

Publication number Publication date
JPS58110949U (ja) 1983-07-28

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