JPS63229865A - 陽極接合方法 - Google Patents
陽極接合方法Info
- Publication number
- JPS63229865A JPS63229865A JP6488087A JP6488087A JPS63229865A JP S63229865 A JPS63229865 A JP S63229865A JP 6488087 A JP6488087 A JP 6488087A JP 6488087 A JP6488087 A JP 6488087A JP S63229865 A JPS63229865 A JP S63229865A
- Authority
- JP
- Japan
- Prior art keywords
- insulating material
- anode
- bonding
- anodic bonding
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 12
- 239000011810 insulating material Substances 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 14
- 239000011521 glass Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- -1 KNO Chemical class 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000549556 Nanos Species 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Ceramic Products (AREA)
- Joining Of Glass To Other Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6488087A JPS63229865A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6488087A JPS63229865A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63229865A true JPS63229865A (ja) | 1988-09-26 |
| JPH0577307B2 JPH0577307B2 (cs) | 1993-10-26 |
Family
ID=13270873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6488087A Granted JPS63229865A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63229865A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03233429A (ja) * | 1990-02-08 | 1991-10-17 | Mitsubishi Electric Corp | 液晶表示素子の製造方法 |
| JPH0664979A (ja) * | 1992-08-20 | 1994-03-08 | Ishizuka Glass Co Ltd | 陽極接合方法 |
-
1987
- 1987-03-19 JP JP6488087A patent/JPS63229865A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03233429A (ja) * | 1990-02-08 | 1991-10-17 | Mitsubishi Electric Corp | 液晶表示素子の製造方法 |
| JPH0664979A (ja) * | 1992-08-20 | 1994-03-08 | Ishizuka Glass Co Ltd | 陽極接合方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577307B2 (cs) | 1993-10-26 |
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