JPS63229570A - パタ−ン検査装置 - Google Patents

パタ−ン検査装置

Info

Publication number
JPS63229570A
JPS63229570A JP62062427A JP6242787A JPS63229570A JP S63229570 A JPS63229570 A JP S63229570A JP 62062427 A JP62062427 A JP 62062427A JP 6242787 A JP6242787 A JP 6242787A JP S63229570 A JPS63229570 A JP S63229570A
Authority
JP
Japan
Prior art keywords
pattern
inspected
sense line
sense
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62062427A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532791B2 (enrdf_load_stackoverflow
Inventor
Hiroshige Sakahara
坂原　広重
Satoshi Sakurai
聡 桜井
Yoriaki Shimizu
清水　順紀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62062427A priority Critical patent/JPS63229570A/ja
Publication of JPS63229570A publication Critical patent/JPS63229570A/ja
Publication of JPH0532791B2 publication Critical patent/JPH0532791B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
JP62062427A 1987-03-19 1987-03-19 パタ−ン検査装置 Granted JPS63229570A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62062427A JPS63229570A (ja) 1987-03-19 1987-03-19 パタ−ン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62062427A JPS63229570A (ja) 1987-03-19 1987-03-19 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS63229570A true JPS63229570A (ja) 1988-09-26
JPH0532791B2 JPH0532791B2 (enrdf_load_stackoverflow) 1993-05-17

Family

ID=13199853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62062427A Granted JPS63229570A (ja) 1987-03-19 1987-03-19 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS63229570A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100266A (en) * 1978-01-25 1979-08-07 Hitachi Ltd Defective mark decision method
JPS5677704A (en) * 1979-11-30 1981-06-26 Hitachi Ltd Inspection system for surface defect of substance

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100266A (en) * 1978-01-25 1979-08-07 Hitachi Ltd Defective mark decision method
JPS5677704A (en) * 1979-11-30 1981-06-26 Hitachi Ltd Inspection system for surface defect of substance

Also Published As

Publication number Publication date
JPH0532791B2 (enrdf_load_stackoverflow) 1993-05-17

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