JPH048833B2 - - Google Patents
Info
- Publication number
- JPH048833B2 JPH048833B2 JP59248908A JP24890884A JPH048833B2 JP H048833 B2 JPH048833 B2 JP H048833B2 JP 59248908 A JP59248908 A JP 59248908A JP 24890884 A JP24890884 A JP 24890884A JP H048833 B2 JPH048833 B2 JP H048833B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- edge
- pixels
- processing
- thin line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000015654 memory Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 8
- 239000000284 extract Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 8
- 230000004069 differentiation Effects 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Spectrometry And Color Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59248908A JPS61126437A (ja) | 1984-11-26 | 1984-11-26 | 画像処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59248908A JPS61126437A (ja) | 1984-11-26 | 1984-11-26 | 画像処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61126437A JPS61126437A (ja) | 1986-06-13 |
| JPH048833B2 true JPH048833B2 (enrdf_load_stackoverflow) | 1992-02-18 |
Family
ID=17185212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59248908A Granted JPS61126437A (ja) | 1984-11-26 | 1984-11-26 | 画像処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61126437A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0827841B2 (ja) * | 1988-04-25 | 1996-03-21 | 松下電工株式会社 | 外観検査方法 |
| JPH09304292A (ja) * | 1996-05-10 | 1997-11-28 | Komatsu Ltd | 欠陥検出装置および方法 |
-
1984
- 1984-11-26 JP JP59248908A patent/JPS61126437A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61126437A (ja) | 1986-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |