JPS6322729U - - Google Patents
Info
- Publication number
- JPS6322729U JPS6322729U JP11688486U JP11688486U JPS6322729U JP S6322729 U JPS6322729 U JP S6322729U JP 11688486 U JP11688486 U JP 11688486U JP 11688486 U JP11688486 U JP 11688486U JP S6322729 U JPS6322729 U JP S6322729U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- counter electrode
- reaction chamber
- thin film
- magnetic poles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11688486U JPS6322729U (el) | 1986-07-30 | 1986-07-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11688486U JPS6322729U (el) | 1986-07-30 | 1986-07-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6322729U true JPS6322729U (el) | 1988-02-15 |
Family
ID=31001891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11688486U Pending JPS6322729U (el) | 1986-07-30 | 1986-07-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6322729U (el) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56121629A (en) * | 1980-02-29 | 1981-09-24 | Canon Inc | Film forming method |
JPS58132920A (ja) * | 1982-02-01 | 1983-08-08 | Kanegafuchi Chem Ind Co Ltd | アモルフアスシリコン系半導体の製造方法 |
JPS59161812A (ja) * | 1983-03-07 | 1984-09-12 | Hitachi Ltd | プラズマcvd装置 |
JPS60234313A (ja) * | 1984-05-07 | 1985-11-21 | Hitachi Ltd | プラズマ処理装置 |
-
1986
- 1986-07-30 JP JP11688486U patent/JPS6322729U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56121629A (en) * | 1980-02-29 | 1981-09-24 | Canon Inc | Film forming method |
JPS58132920A (ja) * | 1982-02-01 | 1983-08-08 | Kanegafuchi Chem Ind Co Ltd | アモルフアスシリコン系半導体の製造方法 |
JPS59161812A (ja) * | 1983-03-07 | 1984-09-12 | Hitachi Ltd | プラズマcvd装置 |
JPS60234313A (ja) * | 1984-05-07 | 1985-11-21 | Hitachi Ltd | プラズマ処理装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0167739U (el) | ||
JPS6322729U (el) | ||
JPS5512733A (en) | Dry process etching device | |
US3347708A (en) | Fuel cell battery containing metal coated carbon electrodes | |
JPS62182538U (el) | ||
JPH0247029U (el) | ||
JPH0648834Y2 (ja) | プラズマcvd装置 | |
JPH0217555U (el) | ||
JP2534674Y2 (ja) | 縦形cvdボ−ト | |
JPS57100762A (en) | Switching element | |
JPS622239U (el) | ||
JPS62152436U (el) | ||
JPH0444364U (el) | ||
JPH0374661U (el) | ||
JPH01169028U (el) | ||
JPS6333626U (el) | ||
JPH0211327U (el) | ||
JPS57124472A (en) | Horizontal type transistor for low frequency | |
JPS6439372A (en) | Thin film forming device | |
JPS6430829U (el) | ||
JPS57202632A (en) | Planar display | |
JPH0178133U (el) | ||
JPH01104638U (el) | ||
JPS6267455U (el) | ||
JPH01158640U (el) |