JPS63224971A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS63224971A JPS63224971A JP5941287A JP5941287A JPS63224971A JP S63224971 A JPS63224971 A JP S63224971A JP 5941287 A JP5941287 A JP 5941287A JP 5941287 A JP5941287 A JP 5941287A JP S63224971 A JPS63224971 A JP S63224971A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- resistant
- thermal head
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002223 garnet Substances 0.000 claims abstract description 17
- 239000010408 film Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 229910000510 noble metal Inorganic materials 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 2
- 150000002910 rare earth metals Chemical class 0.000 claims description 2
- 229910001122 Mischmetal Inorganic materials 0.000 claims 1
- 239000004745 nonwoven fabric Substances 0.000 claims 1
- 238000005299 abrasion Methods 0.000 abstract description 7
- 239000012528 membrane Substances 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 abstract description 3
- 238000007651 thermal printing Methods 0.000 abstract description 2
- 230000003064 anti-oxidating effect Effects 0.000 abstract 2
- 229910019834 RhO2 Inorganic materials 0.000 abstract 1
- KZYDBKYFEURFNC-UHFFFAOYSA-N dioxorhodium Chemical compound O=[Rh]=O KZYDBKYFEURFNC-UHFFFAOYSA-N 0.000 abstract 1
- XSXHWVKGUXMUQE-UHFFFAOYSA-N osmium dioxide Inorganic materials O=[Os]=O XSXHWVKGUXMUQE-UHFFFAOYSA-N 0.000 abstract 1
- 239000010970 precious metal Substances 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(III) nitrate Inorganic materials [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electronic Switches (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、ファクシミリ受信装置、パーソナルコンピュ
ータ等において、熱転写、若しくは直熱印字を行うサー
マルプリンタに使用されるサーマルヘッドに関するもの
である。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thermal head used in a thermal printer that performs thermal transfer or direct thermal printing in facsimile receiving devices, personal computers, and the like.
従来の技術
近時、ファクシミリ受信装置、パーソナルコンピュータ
等におけるプリンタとして、高速性、静寂性、高分解能
化の追求が進み、低価格で構成できるサーマルヘッドが
使用されるようになっている。2. Description of the Related Art In recent years, printers for facsimile receiving devices, personal computers, etc. have been pursued to be faster, quieter, and have higher resolution, and thermal heads that can be constructed at low cost have come to be used.
以下、従来のサーマルヘッドについて第２図を参照しな
がら説明する。Hereinafter, a conventional thermal head will be explained with reference to FIG.
第２図において、１１は基体で、アルミナセラミクスか
らなる基板１２の表面にガラス材１３がコートされてい
る。１４は基体１１上に設けられた薄膜からなる発熱体
層、１５は発熱体層１４上に所定のパターンで設けられ
た電流印加用の電極、１６は電極１５と電極開放部の発
熱体層１４上に設けられた保護膜層である。保護膜層１
６は発熱体層１４や電極１５の酸化や吸湿などによる腐
食劣化を防止する効果と、このサーマルヘッドに接触し
て走行する感熱紙又は感熱転写リボンとの耐摩耗の効果
を有する材料によ多形成されている。In FIG. 2, reference numeral 11 denotes a base body, and the surface of a substrate 12 made of alumina ceramics is coated with a glass material 13. 14 is a heating element layer made of a thin film provided on the base 11, 15 is an electrode for applying current provided in a predetermined pattern on the heating element layer 14, and 16 is a heating element layer 14 between the electrode 15 and the electrode open part. A protective film layer provided above. Protective film layer 1
6 is a material that has the effect of preventing corrosion deterioration due to oxidation and moisture absorption of the heating element layer 14 and the electrodes 15, and the effect of resisting abrasion of the thermal paper or thermal transfer ribbon that runs in contact with this thermal head. It is formed.
そして、従来、この種のサーマルヘッドには下記の条件
が要求されている。Conventionally, this type of thermal head is required to meet the following conditions.
（１）印時速度が高いこと。(1) The printing speed is high.
（２）低電力で高温、高品質印字を行うことができるこ
と。(2) Capable of high-temperature, high-quality printing with low power.
（３）文字の分解能が高いこと。(3) High character resolution.
（４）廉価なサーマルヘッド（低分解能、低速度、超安
価）に対応できるよう価格が安いこと。(4) The price is low so that it can be compatible with inexpensive thermal heads (low resolution, low speed, ultra-low price).
（５）安価に提供することができるように大量生産プロ
セスを導入することができ、生産性が高いこと。(5) It is possible to introduce a mass production process so that it can be provided at a low price, and the productivity is high.
（６）感熱紙、感熱リボンに対する耐摩耗性が高いこと
。(6) High abrasion resistance against thermal paper and thermal ribbon.
（７）耐湿性、耐電気腐食に優れ、信頼性の高い保護膜
を有すること。(7) It has excellent moisture resistance and electrical corrosion resistance, and has a highly reliable protective film.
このため、従来においては、乾式薄膜プロセスを採用し
た薄膜ヘッドが生産され、上記（１） 、 （２） 。For this reason, conventionally, thin film heads employing a dry thin film process have been produced, as described in (1) and (2) above.
（３）項の条件を満たし、（６） 、 （７）項の条件
に対処するだめ、保護膜層 ６として、Ｓ ｉＣＴ Ｓ
ｉａ Ｎ４ 、 Ｓ ＩＯ２１Ｔａ２０５１ＢＰ、Ｔ
ｉＯ２１Ａ１２０３等の硬質材料をスパッタ法を用いて
５〜１０μｍ厚に薄く積層し、また上記（４）項の条件
の対策として、発熱体層１４にＴａ−８ｉ合金、５ｉＣ
−８ｉＯ２＋ＴａｚＮ、Ｃｒ５ｉ−。If the conditions in (3) are satisfied and the conditions in (6) and (7) are not met, SiCT S is used as the protective film layer 6.
ia N4, S IO21Ta2051BP, T
A hard material such as iO21A1203 is thinly laminated to a thickness of 5 to 10 μm using a sputtering method, and as a countermeasure for the condition (4) above, Ta-8i alloy, 5iC
-8iO2+TazN, Cr5i-.
等の材料を用い、電極１５として、安価なＣａを使用す
ることが多かった。In many cases, inexpensive Ca was used as the electrode 15.
発明が解決しようとする問題点
しかしながら、上記従来例のサーマルヘッドの構成及び
その材料では、上記（５）項の条件である生産性に問題
があり、また上記の安価な材料は耐候性、特に酸化、吸
湿に弱い。これらの欠点を補うためには保護膜層１６を
厚くしたり、多層化や複合材の使用等を余儀なくされる
ことになり、結局（４）項の条件を失い、高価となる問
題点を有していた。Problems to be Solved by the Invention However, the structure of the conventional thermal head and the material thereof have a problem in productivity, which is the condition in item (5) above, and the inexpensive material mentioned above has poor weather resistance, especially Resistant to oxidation and moisture absorption. In order to compensate for these shortcomings, it is necessary to thicken the protective film layer 16, make it multi-layered, use composite materials, etc., which results in the problem of losing the condition (4) and becoming expensive. Was.
そこで、本発明は、高分解能化、高速性、高耐久、耐候
性を図ることができ、また生産性を向上させて低コスト
化を図ることができるようにした術的な手段は、耐熱性
の基体上に貴金属酸化物を主体とする発熱体層を設け、
この発熱体層上に電流印加用の電極を設け、この電極と
電極開放部の発熱体の上に耐熱、非電導性酸化物からな
り、少なくともガーネット構造を含む耐摩耗膜層を設け
たものである。Therefore, the present invention provides technical means to achieve high resolution, high speed, high durability, and weather resistance, as well as to improve productivity and reduce costs. A heating element layer mainly made of noble metal oxide is provided on the base of
An electrode for applying current is provided on this heating element layer, and a wear-resistant film layer made of a heat-resistant, non-conductive oxide and containing at least a garnet structure is provided on this electrode and the heating element in the electrode open part. be.
作用 上記技術的手段による作用は次のようになる。action The effects of the above technical means are as follows.
すなわち、発熱体層は耐酸化、耐熱性に優れ、また耐摩
耗膜層は耐熱、耐電食に優れているので、高分解能、高
速、高耐久性、高耐候性を図ることができ、また発熱体
層を構成する貴金属酸化物と耐摩耗膜層を構成するガー
ネット構造物は塗布方式によ多形成することができるの
で、生産性を高めることができる。In other words, the heating element layer has excellent oxidation resistance and heat resistance, and the wear-resistant film layer has excellent heat resistance and electrical corrosion resistance, so high resolution, high speed, high durability, and high weather resistance can be achieved. Since the noble metal oxide constituting the body layer and the garnet structure constituting the wear-resistant film layer can be formed in multiple forms by a coating method, productivity can be increased.
実施例
以下、本発明の実施例について図面を参照しながら説明
する。第１図（ａ）ないしくｄ）は本発明の一実施例に
おけるサーマルヘッドの製造工程を示す断面図である。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings. FIGS. 1(a) to 1(d) are cross-sectional views showing the manufacturing process of a thermal head in an embodiment of the present invention.
本拠明のサーマルヘッドは製造完成状態において、第１
図（ｄ）に示すように構成される。第１図（ｄ）におい
て、Ｉは基体で、セラミックス基板の表面にガラス材が
コートされている。２は基体１上に設けられた発熱体層
、３は発熱体層２上に所定のパターンで設けられた電極
、４は電極３と電極開放部の発熱体層２上に設けられた
耐摩耗膜層である。In the fully manufactured state, the thermal head made by Akira Honjo is the first one.
It is configured as shown in Figure (d). In FIG. 1(d), I is a base body, and the surface of a ceramic substrate is coated with a glass material. 2 is a heating element layer provided on the base 1; 3 is an electrode provided in a predetermined pattern on the heating element layer 2; 4 is an abrasion resistant layer provided on the electrode 3 and the heating element layer 2 at the open part of the electrode. It is a membrane layer.
上記基体１は従来と同様の材料によ多形成されているが
、発熱体層２は耐酸化性、耐熱性に優れたＲｕ０２１０
８０２１Ｒｈ０２などの貴金属酸化物により形成され、
電極３は耐腐食性、耐酸化性に優れたＡｕにより形成さ
れ、耐摩耗膜層４は耐熱、非電導性酸化物として、Ｍａ
３・ＭｂｓＯｘｚの成分配合を持ち、Ｍａとして３価稀
土類金属（主にＹと４ｆ族の混成からなるミツシュメタ
ル）、ＭｂとしてＦｅを用いたガーネット構造物（ザク
ロ石構造）により形成されている。このガーネット構造
物を用いる場合、５１１Ｃａ系が主体である７ＸＦｅ系
ガーネツトは硬度６．５〜７．５と高く、充分な耐摩耗
性を持ち、化学安定性が高く、シかも電気伝導は低く、
組成がずれても抵抗がずれても抵抗値が１「３Ω・１以
ドになることが無い。また乾式プロセスを用いないでも
量産化可能な方式で製膜が可能である。それ散財腐食、
耐電食に優れた利点を有する。また上記発熱体層２を形
成する発熱材料は耐酸化、耐熱性に優れ、８００℃の空
気中でも安定であり、製法も塗布式が使用できる。また
上記電極３を形成するＡμも耐腐食性、耐酸化性、耐候
性のいずれにも優れ、蒸着により形成することができる
ので、使用量は少くて済み、しかもガーネット耐摩耗膜
層４を形成する際の高温、酸化に充分耐えることができ
る。The base body 1 is made of the same material as before, but the heating element layer 2 is made of Ru0210, which has excellent oxidation resistance and heat resistance.
Formed from noble metal oxides such as 8021Rh02,
The electrode 3 is made of Au, which has excellent corrosion resistance and oxidation resistance, and the wear-resistant film layer 4 is made of Ma as a heat-resistant, non-conductive oxide.
It has a component composition of 3.MbsOxz, and is formed of a garnet structure (garnet structure) using a trivalent rare earth metal (mainly Mitshu metal consisting of a mixture of Y and 4f group) as Ma and Fe as Mb. When using this garnet structure, 7XFe garnet, which is mainly composed of 511Ca, has a high hardness of 6.5 to 7.5, sufficient wear resistance, high chemical stability, and low electrical conductivity.
Even if the composition shifts or the resistance shifts, the resistance value will never drop below 1 to 3 Ω.1.Furthermore, the film can be formed in a method that can be mass-produced without using a dry process.
It has the advantage of excellent resistance to electrical corrosion. Further, the heat generating material forming the heat generating layer 2 has excellent oxidation resistance and heat resistance, is stable even in air at 800° C., and a coating method can be used for manufacturing. In addition, the Aμ forming the electrode 3 has excellent corrosion resistance, oxidation resistance, and weather resistance, and can be formed by vapor deposition, so the amount used can be small, and it forms the garnet wear-resistant film layer 4. It can withstand high temperatures and oxidation during processing.
次に本発明の具体的製造順序について説明する。Next, the specific manufacturing order of the present invention will be explained.
第１図（ａ）に示すようにグレーズドアルミナ製の基板
１の表面にガラスを流して基体１を形成し、この基体１
上に酸化ルテニウム（Ｒ，ｕＯ２）粉を含むペーストを
希望するヘッドパターン状にスクリーン印刷により塗布
し、空気中で５００〜７００℃の温度で１時間、焼結し
、発熱体層２を形成した。As shown in FIG. 1(a), glass is poured onto the surface of a substrate 1 made of glazed alumina to form a base 1.
A paste containing ruthenium oxide (R, uO2) powder was applied on top by screen printing into a desired head pattern, and sintered in air at a temperature of 500 to 700°C for 1 hour to form a heating element layer 2. .
この発熱体層２上に金ペースト希望するパターンに塗布
し、同様に空気中で焼成して電極３を形成した。この電
極３はパターン精度を上げるため、蒸着マスクを用い、
蒸着プロセスにより金薄膜を形成してもよい。次にＹ
（ＮＯ３）３ ・６Ｈ２０とＦｅ（ＮＯ３）３・９Ｈ２
０の同量、０．０１５モルずつを約２００ＣＣの水とエ
チルアルコールに溶解して混合溶液を作り、これを電極
８と電極開放部の発熱体層２の上に数滴、滴下し、スピ
ンナーにより毎分８０００ｒｐｍで１５〜２０秒間、乾
燥、乾固して第１図中）に示すように均一な硝酸塩混合
物の膜４ａを形成した。これをホットプレート上、空気
中で３００〜５００℃に加熱すると、数分でアモルファ
ス状（ガラス状）ガーネット混合膜になシ、厚みはｘｏ
ｏｏＡであった。このガーネット混合膜を６５０℃以上
に加熱すると、第１図（Ｃ）に示すようにＹ３Ｆｅｓ
０１２のガーネット結晶構造物であるガーネット被膜４
ｂが生成しているのが分った。これら第１図（ｂ）及び
（ｃ）の工程を数回繰返すことによシ第１図（′ｂ）に
示すように約１μｍ位のガラス状、ガーネット、すなわ
ち非晶質を含むガーネットの耐摩耗膜層４を得ることが
できた。そしてあらかじめ金電極３上を被っていたＡ１
をリフトオフとして苛性ソーダ液で除去し、電極端子を
取シ出すことによシサーマルヘッドを得ることができた
。A gold paste was applied onto this heating element layer 2 in a desired pattern and similarly fired in air to form an electrode 3. This electrode 3 uses a vapor deposition mask to improve pattern accuracy.
A thin gold film may be formed by a vapor deposition process. Next Y
(NO3)3 ・6H20 and Fe(NO3)3 ・9H2
Prepare a mixed solution by dissolving the same amount of 0.015 mol each in approximately 200 cc of water and ethyl alcohol, then drop a few drops of this onto the electrode 8 and the heating element layer 2 at the electrode open part, and apply it using a spinner. The mixture was dried and solidified to dryness at 8000 rpm for 15 to 20 seconds to form a uniform film 4a of the nitrate mixture as shown in Fig. 1). When this is heated to 300-500℃ in air on a hot plate, it becomes an amorphous (glass-like) garnet mixed film in a few minutes, with a thickness of xo
It was ooA. When this garnet mixed film is heated to 650°C or higher, Y3Fes is formed as shown in Figure 1 (C).
Garnet coating 4 which is a garnet crystal structure of 012
It was found that b was generated. By repeating the steps in Fig. 1(b) and (c) several times, as shown in Fig. 1('b), a glass-like garnet of about 1 μm, that is, a garnet containing amorphous material, can be produced. A wear film layer 4 could be obtained. Then, A1, which had covered the top of the gold electrode 3 in advance,
By removing it with caustic soda solution as a lift-off and taking out the electrode terminals, we were able to obtain a thermal head.
このサーマルヘッドの発熱体層２の抵抗値は耐摩耗膜層
２の形成前と変わらず、耐パルステストでも充分サーマ
ルヘッドとしての許容値（１０８回以耐えること）を満
たした。The resistance value of the heating element layer 2 of this thermal head was the same as before the formation of the abrasion-resistant film layer 2, and it sufficiently satisfied the permissible value for a thermal head (withstanding 108 cycles or more) in the pulse resistance test.
このガーネット耐摩耗膜６はアルコール溶解液の濃度を
高くしたシ、スピンナー速度を下げることにより、容易
に１回当シの膜厚を増やすことができ、数μｍの被膜を
１０回程度の積層で製作することも可能である。This garnet wear-resistant film 6 can be easily increased in thickness per layer by increasing the concentration of the alcohol solution and lowering the spinner speed. It is also possible to manufacture.
発明の効果
以上述べたように本発明によれば、発熱体層を貴金属化
物により形成し、耐摩耗膜を耐熱、非電導性酸化物から
なり、少なくともガーネット構造を含む膜により形成し
ているので、高分解能、高速、高耐久、耐候性を図るる
ことができ、また上記材料は塗布工程により製作製でき
るので、生産性を向上させ、低コスト化を図ることがで
きる。Effects of the Invention As described above, according to the present invention, the heat generating layer is formed of a noble metal oxide, and the wear-resistant film is formed of a heat-resistant, non-conductive oxide film containing at least a garnet structure. , high resolution, high speed, high durability, and weather resistance can be achieved, and since the above materials can be manufactured by a coating process, productivity can be improved and costs can be reduced.
第１図（ａ）ないしくｄ）は本発明の一実施例における
サーマルヘッドの製造工程を示す断面図、第２図は従来
のサーマルヘッドの断面図である。
１・・・基体、２・・・発熱体層、３・・・電極、４・
・・耐摩耗膜層。FIGS. 1(a) to d) are cross-sectional views showing the manufacturing process of a thermal head according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of a conventional thermal head. DESCRIPTION OF SYMBOLS 1... Base body, 2... Heat generating layer, 3... Electrode, 4...
...Abrasion-resistant film layer.
Claims (4)
体層を設け、この発熱体層上に電流印加用の電極を設け
、この電極と電極開放部の発熱体の上に耐熱非電導性酸
化物からなり、少なくともガーネット構造を含む耐摩耗
膜層を設けたことを特徴とするサーマルヘッド。(1) A heating element layer mainly made of noble metal oxide is provided on a heat-resistant base, an electrode for applying current is provided on this heating element layer, and a heat-resistant non-woven fabric is placed on this electrode and the heating element in the open part of the electrode. A thermal head comprising a wear-resistant film layer made of a conductive oxide and containing at least a garnet structure.
のいずれかを主成分とする薄膜からなる特許請求の範囲
第１項記載のサーマルヘッド。(2) The heating element layer is RuO_2, OsO_2, RhO_2
The thermal head according to claim 1, comprising a thin film containing any one of these as a main component.
の範囲第１項記載のサーマルヘッド。(3) The thermal head according to claim 1, wherein the electrodes are made of a thin film containing Au as a main component.
分配合を持ち、Ｍａとして３価稀土類金属（主にＹと４
ｆ族の混成からなるミッシュメタル）、ＭｂとしてＦｅ
を用いた材料からなる特許請求の範囲第１項記載のサー
マルヘッド。(4) The wear-resistant film layer has a composition of Ma_3・Mb_5O_1_2, and Ma is a trivalent rare earth metal (mainly Y and 4
misch metal consisting of a hybrid of f group), Fe as Mb
The thermal head according to claim 1, which is made of a material using.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5941287A JPS63224971A (en) | 1987-03-13 | 1987-03-13 | Thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5941287A JPS63224971A (en) | 1987-03-13 | 1987-03-13 | Thermal head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63224971A true JPS63224971A (en) | 1988-09-20 |
Family
ID=13112535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5941287A Pending JPS63224971A (en) | 1987-03-13 | 1987-03-13 | Thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63224971A (en) |
-
1987
- 1987-03-13 JP JP5941287A patent/JPS63224971A/en active Pending
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