JPS6321854B2 - - Google Patents

Info

Publication number
JPS6321854B2
JPS6321854B2 JP7558380A JP7558380A JPS6321854B2 JP S6321854 B2 JPS6321854 B2 JP S6321854B2 JP 7558380 A JP7558380 A JP 7558380A JP 7558380 A JP7558380 A JP 7558380A JP S6321854 B2 JPS6321854 B2 JP S6321854B2
Authority
JP
Japan
Prior art keywords
light
box
laser beam
face plate
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7558380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS571955A (en
Inventor
Yasuo Hachikake
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP7558380A priority Critical patent/JPS571955A/ja
Publication of JPS571955A publication Critical patent/JPS571955A/ja
Publication of JPS6321854B2 publication Critical patent/JPS6321854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7558380A 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface Granted JPS571955A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7558380A JPS571955A (en) 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7558380A JPS571955A (en) 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface

Publications (2)

Publication Number Publication Date
JPS571955A JPS571955A (en) 1982-01-07
JPS6321854B2 true JPS6321854B2 (en, 2012) 1988-05-09

Family

ID=13580352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7558380A Granted JPS571955A (en) 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface

Country Status (1)

Country Link
JP (1) JPS571955A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158937A (ja) * 1982-03-17 1983-09-21 Hitachi Ltd 表面の欠陥検査装置
JPS62105038A (ja) * 1985-11-01 1987-05-15 Hitachi Electronics Eng Co Ltd ガラス基板表面検査装置受光系
JPH02269938A (ja) * 1989-04-11 1990-11-05 Idemitsu Petrochem Co Ltd 分析装置

Also Published As

Publication number Publication date
JPS571955A (en) 1982-01-07

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