JPS571955A - Light receiving device for inspecting plate surface - Google Patents

Light receiving device for inspecting plate surface

Info

Publication number
JPS571955A
JPS571955A JP7558380A JP7558380A JPS571955A JP S571955 A JPS571955 A JP S571955A JP 7558380 A JP7558380 A JP 7558380A JP 7558380 A JP7558380 A JP 7558380A JP S571955 A JPS571955 A JP S571955A
Authority
JP
Japan
Prior art keywords
slit
plate
box
light receiving
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7558380A
Other languages
Japanese (ja)
Other versions
JPS6321854B2 (en
Inventor
Yasuo Hachikake
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP7558380A priority Critical patent/JPS571955A/en
Publication of JPS571955A publication Critical patent/JPS571955A/en
Publication of JPS6321854B2 publication Critical patent/JPS6321854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To increase the sensitivity in checking defective parts by providing a specified slit for inputting and outputting a laser beam at the bottom of a tightly enclosed box in inspecting silicon wafers and the like. CONSTITUTION:A pair of scattered light sensors each comprising a cylindrical lens 9 and a light receiving slit plate 12, and a linear photoelectric converter 8a are enclosed in cases 13, and fixed to a base 15 by supporting plate 14 in parallel with and on both sides of a scanning line A so that they face to each other. The pair of the cases 13 are covered by a box 10 and tightly closed. The width of the slits provided in the lid and bottom of the box 10 are of the minimum size required for passing the laser beam 2. The base 15 is arranged at the close proximity to the plate 5 to be inspected in parallel. The scanning line A is a central line of the light emitting slit 11. At the time of inspection, the plate 5 is moved in the direction at a right angle with the longitudinal direction of the slit 11, and secondary scanning is performed in the Y direction.
JP7558380A 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface Granted JPS571955A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7558380A JPS571955A (en) 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7558380A JPS571955A (en) 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface

Publications (2)

Publication Number Publication Date
JPS571955A true JPS571955A (en) 1982-01-07
JPS6321854B2 JPS6321854B2 (en) 1988-05-09

Family

ID=13580352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7558380A Granted JPS571955A (en) 1980-06-06 1980-06-06 Light receiving device for inspecting plate surface

Country Status (1)

Country Link
JP (1) JPS571955A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158937A (en) * 1982-03-17 1983-09-21 Hitachi Ltd Surface defect detector
JPS62105038A (en) * 1985-11-01 1987-05-15 Hitachi Electronics Eng Co Ltd Photodetection system for inspecting instrument for glass substrate surface
JPH02269938A (en) * 1989-04-11 1990-11-05 Idemitsu Petrochem Co Ltd Analysis apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158937A (en) * 1982-03-17 1983-09-21 Hitachi Ltd Surface defect detector
JPS62105038A (en) * 1985-11-01 1987-05-15 Hitachi Electronics Eng Co Ltd Photodetection system for inspecting instrument for glass substrate surface
JPH02269938A (en) * 1989-04-11 1990-11-05 Idemitsu Petrochem Co Ltd Analysis apparatus

Also Published As

Publication number Publication date
JPS6321854B2 (en) 1988-05-09

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