JPS632100Y2 - - Google Patents
Info
- Publication number
- JPS632100Y2 JPS632100Y2 JP548985U JP548985U JPS632100Y2 JP S632100 Y2 JPS632100 Y2 JP S632100Y2 JP 548985 U JP548985 U JP 548985U JP 548985 U JP548985 U JP 548985U JP S632100 Y2 JPS632100 Y2 JP S632100Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- inner cylinder
- high temperature
- temperature section
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012717 electrostatic precipitator Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000700605 Viruses Species 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005367 electrostatic precipitation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Electrostatic Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP548985U JPS632100Y2 (ro) | 1985-01-18 | 1985-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP548985U JPS632100Y2 (ro) | 1985-01-18 | 1985-01-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121931U JPS61121931U (ro) | 1986-08-01 |
| JPS632100Y2 true JPS632100Y2 (ro) | 1988-01-20 |
Family
ID=30482040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP548985U Expired JPS632100Y2 (ro) | 1985-01-18 | 1985-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS632100Y2 (ro) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0757297B2 (ja) * | 1987-04-22 | 1995-06-21 | 日本真空技術株式会社 | 真空排気系用微粒子トラツプ |
| JPH0757298B2 (ja) * | 1987-05-19 | 1995-06-21 | 日本真空技術株式会社 | 真空排気系用微粒子捕集装置 |
| JP5081527B2 (ja) * | 2007-07-26 | 2012-11-28 | 東京エレクトロン株式会社 | 気体清浄化装置及び気体清浄化方法 |
| JP5442818B2 (ja) * | 2012-09-03 | 2014-03-12 | 東京エレクトロン株式会社 | 気体清浄化装置 |
| CN106178770B (zh) * | 2016-10-11 | 2019-01-25 | 中国计量大学 | 基于热泳效应的空气小颗粒吸附装置 |
-
1985
- 1985-01-18 JP JP548985U patent/JPS632100Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61121931U (ro) | 1986-08-01 |
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