JPS61121931U - - Google Patents
Info
- Publication number
- JPS61121931U JPS61121931U JP548985U JP548985U JPS61121931U JP S61121931 U JPS61121931 U JP S61121931U JP 548985 U JP548985 U JP 548985U JP 548985 U JP548985 U JP 548985U JP S61121931 U JPS61121931 U JP S61121931U
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- air
- low
- space
- temperature section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Electrostatic Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP548985U JPS632100Y2 (ro) | 1985-01-18 | 1985-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP548985U JPS632100Y2 (ro) | 1985-01-18 | 1985-01-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121931U true JPS61121931U (ro) | 1986-08-01 |
| JPS632100Y2 JPS632100Y2 (ro) | 1988-01-20 |
Family
ID=30482040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP548985U Expired JPS632100Y2 (ro) | 1985-01-18 | 1985-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS632100Y2 (ro) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63264118A (ja) * | 1987-04-22 | 1988-11-01 | Ulvac Corp | 真空排気系用微粒子トラツプ |
| JPS63287524A (ja) * | 1987-05-19 | 1988-11-24 | Ulvac Corp | 真空排気系用微粒子捕集装置 |
| JP2009028632A (ja) * | 2007-07-26 | 2009-02-12 | Tokyo Electron Ltd | 気体清浄化装置及び気体清浄化方法 |
| JP2013039565A (ja) * | 2012-09-03 | 2013-02-28 | Tokyo Electron Ltd | 気体清浄化装置 |
| CN106178770A (zh) * | 2016-10-11 | 2016-12-07 | 中国计量大学 | 基于热泳效应的空气小颗粒吸附装置 |
-
1985
- 1985-01-18 JP JP548985U patent/JPS632100Y2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63264118A (ja) * | 1987-04-22 | 1988-11-01 | Ulvac Corp | 真空排気系用微粒子トラツプ |
| JPS63287524A (ja) * | 1987-05-19 | 1988-11-24 | Ulvac Corp | 真空排気系用微粒子捕集装置 |
| JP2009028632A (ja) * | 2007-07-26 | 2009-02-12 | Tokyo Electron Ltd | 気体清浄化装置及び気体清浄化方法 |
| JP2013039565A (ja) * | 2012-09-03 | 2013-02-28 | Tokyo Electron Ltd | 気体清浄化装置 |
| CN106178770A (zh) * | 2016-10-11 | 2016-12-07 | 中国计量大学 | 基于热泳效应的空气小颗粒吸附装置 |
| CN106178770B (zh) * | 2016-10-11 | 2019-01-25 | 中国计量大学 | 基于热泳效应的空气小颗粒吸附装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS632100Y2 (ro) | 1988-01-20 |