JPS632054B2 - - Google Patents
Info
- Publication number
- JPS632054B2 JPS632054B2 JP16535279A JP16535279A JPS632054B2 JP S632054 B2 JPS632054 B2 JP S632054B2 JP 16535279 A JP16535279 A JP 16535279A JP 16535279 A JP16535279 A JP 16535279A JP S632054 B2 JPS632054 B2 JP S632054B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- tin oxide
- palladium
- evaporation
- ultrafine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 24
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 13
- 229910001887 tin oxide Inorganic materials 0.000 claims description 13
- 239000011882 ultra-fine particle Substances 0.000 claims description 13
- 229910052763 palladium Inorganic materials 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 230000008020 evaporation Effects 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- 235000019441 ethanol Nutrition 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16535279A JPS5687851A (en) | 1979-12-18 | 1979-12-18 | Sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16535279A JPS5687851A (en) | 1979-12-18 | 1979-12-18 | Sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5687851A JPS5687851A (en) | 1981-07-16 |
| JPS632054B2 true JPS632054B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-16 |
Family
ID=15810721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16535279A Granted JPS5687851A (en) | 1979-12-18 | 1979-12-18 | Sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5687851A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1979
- 1979-12-18 JP JP16535279A patent/JPS5687851A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5687851A (en) | 1981-07-16 |