JPS63200336U - - Google Patents

Info

Publication number
JPS63200336U
JPS63200336U JP9233287U JP9233287U JPS63200336U JP S63200336 U JPS63200336 U JP S63200336U JP 9233287 U JP9233287 U JP 9233287U JP 9233287 U JP9233287 U JP 9233287U JP S63200336 U JPS63200336 U JP S63200336U
Authority
JP
Japan
Prior art keywords
gas supply
supply head
film
semiconductor manufacturing
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9233287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9233287U priority Critical patent/JPS63200336U/ja
Publication of JPS63200336U publication Critical patent/JPS63200336U/ja
Pending legal-status Critical Current

Links

JP9233287U 1987-06-15 1987-06-15 Pending JPS63200336U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9233287U JPS63200336U (enrdf_load_stackoverflow) 1987-06-15 1987-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9233287U JPS63200336U (enrdf_load_stackoverflow) 1987-06-15 1987-06-15

Publications (1)

Publication Number Publication Date
JPS63200336U true JPS63200336U (enrdf_load_stackoverflow) 1988-12-23

Family

ID=30953944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9233287U Pending JPS63200336U (enrdf_load_stackoverflow) 1987-06-15 1987-06-15

Country Status (1)

Country Link
JP (1) JPS63200336U (enrdf_load_stackoverflow)

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