JPS628631U - - Google Patents

Info

Publication number
JPS628631U
JPS628631U JP9815485U JP9815485U JPS628631U JP S628631 U JPS628631 U JP S628631U JP 9815485 U JP9815485 U JP 9815485U JP 9815485 U JP9815485 U JP 9815485U JP S628631 U JPS628631 U JP S628631U
Authority
JP
Japan
Prior art keywords
nozzle
hot plate
raw material
vapor phase
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9815485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9815485U priority Critical patent/JPS628631U/ja
Publication of JPS628631U publication Critical patent/JPS628631U/ja
Pending legal-status Critical Current

Links

JP9815485U 1985-06-27 1985-06-27 Pending JPS628631U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9815485U JPS628631U (enrdf_load_stackoverflow) 1985-06-27 1985-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9815485U JPS628631U (enrdf_load_stackoverflow) 1985-06-27 1985-06-27

Publications (1)

Publication Number Publication Date
JPS628631U true JPS628631U (enrdf_load_stackoverflow) 1987-01-19

Family

ID=30965829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9815485U Pending JPS628631U (enrdf_load_stackoverflow) 1985-06-27 1985-06-27

Country Status (1)

Country Link
JP (1) JPS628631U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS628631U (enrdf_load_stackoverflow)
JPS6170929U (enrdf_load_stackoverflow)
JPS63161810U (enrdf_load_stackoverflow)
JPH01179431U (enrdf_load_stackoverflow)
JPS63134536U (enrdf_load_stackoverflow)
JPS6457026U (enrdf_load_stackoverflow)
JPH0316612U (enrdf_load_stackoverflow)
JPH01133732U (enrdf_load_stackoverflow)
JPS63164220U (enrdf_load_stackoverflow)
JPH0193728U (enrdf_load_stackoverflow)
JPH01129259U (enrdf_load_stackoverflow)
JPS6319565U (enrdf_load_stackoverflow)
JPH01164225U (enrdf_load_stackoverflow)
JPS62190339U (enrdf_load_stackoverflow)
JPH033739U (enrdf_load_stackoverflow)
JPS62138440U (enrdf_load_stackoverflow)
JPH0330260U (enrdf_load_stackoverflow)
JPH0428948U (enrdf_load_stackoverflow)
JPS63106765U (enrdf_load_stackoverflow)
JPS646036U (enrdf_load_stackoverflow)
JPH0357963U (enrdf_load_stackoverflow)
JPS62167608U (enrdf_load_stackoverflow)
JPS6295785U (enrdf_load_stackoverflow)
JPS63177031U (enrdf_load_stackoverflow)
JPS62144200U (enrdf_load_stackoverflow)