JPS63134536U - - Google Patents

Info

Publication number
JPS63134536U
JPS63134536U JP2801887U JP2801887U JPS63134536U JP S63134536 U JPS63134536 U JP S63134536U JP 2801887 U JP2801887 U JP 2801887U JP 2801887 U JP2801887 U JP 2801887U JP S63134536 U JPS63134536 U JP S63134536U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
sprays
transported
model registration
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2801887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069502Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2801887U priority Critical patent/JPH069502Y2/ja
Publication of JPS63134536U publication Critical patent/JPS63134536U/ja
Application granted granted Critical
Publication of JPH069502Y2 publication Critical patent/JPH069502Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2801887U 1987-02-25 1987-02-25 半導体製造装置 Expired - Lifetime JPH069502Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2801887U JPH069502Y2 (ja) 1987-02-25 1987-02-25 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2801887U JPH069502Y2 (ja) 1987-02-25 1987-02-25 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS63134536U true JPS63134536U (enrdf_load_stackoverflow) 1988-09-02
JPH069502Y2 JPH069502Y2 (ja) 1994-03-09

Family

ID=30830595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2801887U Expired - Lifetime JPH069502Y2 (ja) 1987-02-25 1987-02-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH069502Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH069502Y2 (ja) 1994-03-09

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