JPH0231127U - - Google Patents

Info

Publication number
JPH0231127U
JPH0231127U JP10938388U JP10938388U JPH0231127U JP H0231127 U JPH0231127 U JP H0231127U JP 10938388 U JP10938388 U JP 10938388U JP 10938388 U JP10938388 U JP 10938388U JP H0231127 U JPH0231127 U JP H0231127U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
heater block
gas supply
semiconductor
supply head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10938388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10938388U priority Critical patent/JPH0231127U/ja
Publication of JPH0231127U publication Critical patent/JPH0231127U/ja
Pending legal-status Critical Current

Links

JP10938388U 1988-08-19 1988-08-19 Pending JPH0231127U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10938388U JPH0231127U (enrdf_load_stackoverflow) 1988-08-19 1988-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10938388U JPH0231127U (enrdf_load_stackoverflow) 1988-08-19 1988-08-19

Publications (1)

Publication Number Publication Date
JPH0231127U true JPH0231127U (enrdf_load_stackoverflow) 1990-02-27

Family

ID=31345579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10938388U Pending JPH0231127U (enrdf_load_stackoverflow) 1988-08-19 1988-08-19

Country Status (1)

Country Link
JP (1) JPH0231127U (enrdf_load_stackoverflow)

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