JPH0323927U - - Google Patents

Info

Publication number
JPH0323927U
JPH0323927U JP8548289U JP8548289U JPH0323927U JP H0323927 U JPH0323927 U JP H0323927U JP 8548289 U JP8548289 U JP 8548289U JP 8548289 U JP8548289 U JP 8548289U JP H0323927 U JPH0323927 U JP H0323927U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment mechanism
type
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8548289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8548289U priority Critical patent/JPH0323927U/ja
Publication of JPH0323927U publication Critical patent/JPH0323927U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP8548289U 1989-07-19 1989-07-19 Pending JPH0323927U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8548289U JPH0323927U (enrdf_load_stackoverflow) 1989-07-19 1989-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8548289U JPH0323927U (enrdf_load_stackoverflow) 1989-07-19 1989-07-19

Publications (1)

Publication Number Publication Date
JPH0323927U true JPH0323927U (enrdf_load_stackoverflow) 1991-03-12

Family

ID=31634643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8548289U Pending JPH0323927U (enrdf_load_stackoverflow) 1989-07-19 1989-07-19

Country Status (1)

Country Link
JP (1) JPH0323927U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH0323927U (enrdf_load_stackoverflow)
JPH0323926U (enrdf_load_stackoverflow)
JPS6382929U (enrdf_load_stackoverflow)
JPH02106823U (enrdf_load_stackoverflow)
JPH0320434U (enrdf_load_stackoverflow)
JPS6190856U (enrdf_load_stackoverflow)
JPH01140816U (enrdf_load_stackoverflow)
JPH0275723U (enrdf_load_stackoverflow)
JPH0210470U (enrdf_load_stackoverflow)
JPS61177440U (enrdf_load_stackoverflow)
JPS6280326U (enrdf_load_stackoverflow)
JPS6150760U (enrdf_load_stackoverflow)
JPH0434733U (enrdf_load_stackoverflow)
JPS63140619U (enrdf_load_stackoverflow)
JPH0165128U (enrdf_load_stackoverflow)
JPS6139937U (ja) 拡散炉型気相成長装置
JPS6262432U (enrdf_load_stackoverflow)
JPS61158947U (enrdf_load_stackoverflow)
JPS63147811U (enrdf_load_stackoverflow)
JPS62170759U (enrdf_load_stackoverflow)
JPH0529129U (ja) 枚葉式ｃｖｄ装置のサセプタ
JPH0226228U (enrdf_load_stackoverflow)
JPS63147814U (enrdf_load_stackoverflow)
JPS6457636U (enrdf_load_stackoverflow)
JPS6418729U (enrdf_load_stackoverflow)