JPS63164213U - - Google Patents

Info

Publication number
JPS63164213U
JPS63164213U JP5698187U JP5698187U JPS63164213U JP S63164213 U JPS63164213 U JP S63164213U JP 5698187 U JP5698187 U JP 5698187U JP 5698187 U JP5698187 U JP 5698187U JP S63164213 U JPS63164213 U JP S63164213U
Authority
JP
Japan
Prior art keywords
atmospheric pressure
semiconductor substrate
vapor deposition
moving direction
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5698187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539628Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5698187U priority Critical patent/JPH0539628Y2/ja
Publication of JPS63164213U publication Critical patent/JPS63164213U/ja
Application granted granted Critical
Publication of JPH0539628Y2 publication Critical patent/JPH0539628Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP5698187U 1987-04-14 1987-04-14 Expired - Lifetime JPH0539628Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5698187U JPH0539628Y2 (enrdf_load_stackoverflow) 1987-04-14 1987-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5698187U JPH0539628Y2 (enrdf_load_stackoverflow) 1987-04-14 1987-04-14

Publications (2)

Publication Number Publication Date
JPS63164213U true JPS63164213U (enrdf_load_stackoverflow) 1988-10-26
JPH0539628Y2 JPH0539628Y2 (enrdf_load_stackoverflow) 1993-10-07

Family

ID=30886276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5698187U Expired - Lifetime JPH0539628Y2 (enrdf_load_stackoverflow) 1987-04-14 1987-04-14

Country Status (1)

Country Link
JP (1) JPH0539628Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0539628Y2 (enrdf_load_stackoverflow) 1993-10-07

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