JPS63124731U - - Google Patents

Info

Publication number

JPS63124731U

JPS63124731U JP1649287U JP1649287U JPS63124731U JP S63124731 U JPS63124731 U JP S63124731U JP 1649287 U JP1649287 U JP 1649287U JP 1649287 U JP1649287 U JP 1649287U JP S63124731 U JPS63124731 U JP S63124731U

Authority

JP

Japan

Prior art keywords

susceptor

wafer

airtight chamber

quartz rod

end surface

Prior art date

1987-02-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
• 238000007664 blowing Methods 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 230000006698 induction Effects 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 230000003287 optical effect Effects 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000006243 chemical reaction Methods 0.000 description 1
• 239000013307 optical fiber Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 238000001947 vapour-phase growth Methods 0.000 description 1